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H. Momose - IEEE Xplore Author Profile

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Recently, demand for sweat measuring sensors has been increasing, especially for detection of heat stroke, dehydration and pathology of neurological diseases. Currently commercially available sensors are immobile, as they are large and require cables and hoses. Previous studies have presented a design that combines a custom chip analog to digital converter (ADC), discrete capacitive humidity and t...Show More
Unified transient and frequency domain noise simulation of random telegraph noise and flicker noise is conducted using a multiphonon-assisted model that considers tunneling probabilities and energy transitions of discretized traps in the gate insulator of MOSFETs. The proposed model is able to concurrently represent the dynamic behavior of electron and hole trapping and detrapping via interactions...Show More
Physical modeling of transient and frequency domain noise simulation for random telegraph noise (RTN) is conducted, considering discretized traps and energy transition in insulator. The models are implemented in a 3D device simulator to consider the device structure effect and bias effect universally. Trap density and trap distribution in insulator are predicted quantitatively with comparison of m...Show More
In this paper, detailed analysis of Fin width and temperature dependence of flicker noise for bulk-FinFET are described. The FinFET with narrow fin width such as below 30 nm is attractive for scaled CMOS because of double gate structure. Additionally, the flicker noise of FinFET decreases and the temperature dependence of the noise become smaller as the fin width becomes narrower. According to our...Show More
This paper presents a detailed analysis of latch-up characteristics for 90 nm RF CMOS on high-resistivity substrate with 400 ohm-cm for the first time. According to our measurement and simulation results, latch-up dependence of PNP base and NPN emitter injection mode on Si substrate resistivity is small. On the other hand, PNP emitter and NPN base injection modes are sensitive to the resistivity b...Show More
Si surface properties and electrical characteristics in n- and p-MOSFETs with 2 - 6 degree tilted off-axis (110) channel were reported. The transconductance of p-MOSFET with off-axis channel was significantly degraded compared with that of normal channel on (110) plane, whereas that of n-MOSFET was slightly improved compared with that of normal channel. The changes were larger than those observed ...Show More
High-resistivity substrate with beyond 1000 ohm-cm realizes high performance in terms of inductor, antenna, MIM capacitor and substrate noise for high- frequency applications. However, this wafer has serious problems for mixed-signal, RF and digital circuits. Those are reduction of high resistivity during sinter process such as 400degC, larger leakage current between nwells, extreme lower snap-bac...Show More
The Si channel surface orientation dependence of electrical characteristics in ultra-thin EOT gate MOSFETs was reviewed. The excellent DC and RF performance were obtained in ultra-thin SiO2 gate p-MOSFETs with (110) oriented Si channel. The properties and electrical characteristics in n- and p-MOSFETs with 2 – 6 degree tilted off-axis (110) channel were also reported. The transconductance of p-MOS...Show More
Si surface properties and electrical characteristics in n- and p-MOSFETs with 2-6 degree tilted off-axis (110) channel were investigated for the first time. The transconductance of p-MOSFET with off-axis channel was significantly degraded than that of normal channel on (110) plane, whereas that of n-MOSFET was slightly improved than that of normal channel. The changes were larger than those observ...Show More
HfSiON is one of the most promising alternative gate dielectric materials for low standby power (LSTP) application. Recently, DC performance, gate leakage current, and reliability have been reported. However, study of analog performances of CMOS with HfSiON gate dielectrics is not sufficient. In this paper, the authors discuss 1/f noise and matching of CMOS with HfSiON gate dielectrics and predict...Show More
HfSiON is one of the most promising alternative gate dielectric materials for low standby power (LSTP) application. Recently, DC performance, gate leakage current, and reliability have been reported by T. Watanabe et al in 2004. However, study of analog performances of CMOS with HfSiON gate dielectrics is not sufficient. In this paper, we discuss 1/f noise and matching of CMOS with HfSiON gate die...Show More
In this paper, it is shown that the 1/f noise is improved by plasma nitridation instead of NO annealing and deuterium annealing after metal formation. Additionally, dependence of the noise on distance between gate electrode and STI edge is reported for the first time.Show More
The dc and RF analog characteristics of ultrathin gate oxide CMOS on [110] surface-oriented Si substrates were investigated for the first time. The transconductance of p-MOSFETs on [110] substrates is 1.9 times greater than that on [100] substrates even in gate oxides in the direct-tunneling regime. An extremely high cutoff frequency of 110 GHz was obtained in 0.11 /spl mu/m gate length p-MOSFETs ...Show More
The properties of ultrathin gate oxides in the direct-tunneling regime and the characteristics of the related CMOS transistors on a [111] surface-oriented Si substrate were investigated and compared with those on a [100] substrate for the first time. It was confirmed that low field mobility of n-MOSFETs on the [111] substrate is smaller than that on the [100] substrate and that of p-MOSFETs on [11...Show More
The DC and RF analog characteristics of ultra-thin gate oxide CMOS on [110] surface-oriented Si substrate were investigated for the first time. Gm of p-MOSFET on [110] substrate is 1.9 times greater than that on [100] substrate, even in gate oxides in a direct-tunneling regime. An extremely high cut-off frequency of 110 GHz was obtained in 0.11 /spl mu/m gate length p-MOSFET with 1.5 nm gate oxide...Show More
Fully oxygen precipitated (FOP) wafers can suppress slip generation during the STI process and maintain high substrate resistivity. Additional boron implantation can suppress the leakage current between the adjacent wells due to shallow Xj. No effect on MOSFET characteristics by this implantation was observed. The high resistivity substrate (HRS) can provide good ESD performance and suppress the p...Show More
Recently, heavily nitrided NO oxynitride has been proposed as an alternative to pure oxide in order to realize high drivability and suppress a large gate leakage current (Fujiwara et al, Digest of IEDM 2000, pp. 227-30, 2000). However, in general, oxynitride has higher interface state density than that of pure oxide, and brings low frequency noise (or 1/f noise) degradation (Kimijima et al., 1999)...Show More
With the expected limitations of conventional CMOS downsizing, various new structures, such as vertical and concave MOSFETs, are under serious investigation. These new types of MOSFETs have a special feature in that the channel of the MOSFETs consists of various surfaces with different crystal orientations. With thinning of the gate oxides, the substrate orientation dependence of the oxide quality...Show More
The nondoped selective epitaxial Si channel technique has been applied to ultrathin gate oxide CMOS transistors. It was confirmed that drain current drive and transconductance are improved in the epitaxial channel MOSFETs with ultrathin gate oxides in the direct-tunneling regime. It was also found that the epitaxial Si channel noticeably reduces the direct-tunneling gate leakage current. The relat...Show More
The high-frequency AC characteristics of 1.5-nm direct-tunneling gate SiO/sub 2/ CMOS are described. Very high cutoff frequencies of 170 GHz and 235 GHz were obtained for 0.08-/spl mu/m and 0.06-/spl mu/m gate length nMOSFETs at room temperature. Cutoff frequency of 65 GHz was obtained for 0.15-/spl mu/m gate length pMOSFETs using 1.5-nm gate SiO/sub 2/ for the first time. The normal oscillations ...Show More
A design method for RF power Si-MOSFETs suitable for low-voltage operation with high power-added efficiency is presented. In our experiments, supply voltages from 1 V to 3 V are examined. As the supply voltage is decreased, degradation of transconductance also takes place. However, this problem is overcome, even at extremely low supply voltages, by adopting a short gate length and also increasing ...Show More
Based on an active transmission line concept and two-dimensional (2-D) device simulations, an accurate and computationally efficient simulation technique for high frequency noise performance of MOSFETs is demonstrated. Using a Langevin stochastic source term model and small-signal equivalent circuit of the MOSFET, three intrinsic noise parameters (/spl gamma/, /spl delta/, and c) for the drain noi...Show More
We describe the relationship between the sheet resistance of Co-silicided poly-Si and various doping elements. The surface condition of the poly-Si before Co sputtering plays an important role in suppressing the "narrow line effect," in which the silicide sheet resistance degrades as the gate length decreases. Si-O and Si-C bonding takes place in the gate poly-Si during RIE processing for gate sid...Show More