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Journal of Microelectromechanical Systems
Year: 2020 | Volume: 29 | Issue: 5
IEEE JMEMS Special Proceeding for the Hilton Head 2020 Workshop
Publication Year: 2020,Page(s):619 - 620
Paraffin-Based Reconfigurable Antenna Operating at 100 GHz
Publication Year: 2020,Page(s):621 - 628
Cited by: Papers (6)
A paraffin-based frequency reconfigurable antenna operating at 100 GHz is reported in this article. Paraffin is a mechanical phase-change material (PCM) that undergoes reversible solid-liquid volumetric change of approximately 15%. In addition, due to its low dielectric loss, this material is suitable for certain electromagnetic applications such as antennas at the millimeter-wave band often defin...Show More
Surface Texture Detection With a New Sub-mm Resolution Flexible Tactile Capacitive Sensor Array for Multimodal Artificial Finger
Edoardo Sotgiu;Diogo E. Aguiam;Carlos Calaza;José Rodrigues;José Fernandes;Bernardo Pires;Eurico Esteves Moreira;Filipe Alves;Helder Fonseca;Rosana Dias;Sofia Martins;João Gaspar
Publication Year: 2020,Page(s):629 - 636
Cited by: Papers (20)
This work presents a flexible polyimide-based capacitive tactile sensing array with sub-millimeter spatial resolution. The sensor is conceived to be embedded in a multimodal artificial finger to detect and classify the texture morphology of an object's surface. The proposed tactile sensor comprises a 16 × 16 array of capacitive sensing units. Each unit is composed of a parallel square electrode pa...Show More
Surface Texture Detection With a New Sub-mm Resolution Flexible Tactile Capacitive Sensor Array for Multimodal Artificial Finger
Edoardo Sotgiu;Diogo E. Aguiam;Carlos Calaza;José Rodrigues;José Fernandes;Bernardo Pires;Eurico Esteves Moreira;Filipe Alves;Helder Fonseca;Rosana Dias;Sofia Martins;João Gaspar
Year: 2020 | Volume: 29 | Issue: 5
Nanostructured Spacers for Thermionic and Thermophotovoltaic Energy Converters
Matthew F. Campbell;Mohsen Azadi;Zhipeng Lu;Andy G. Eskenazi;Akshat Jain;Ji Won Bang;Philip G. Sieg;George A. Popov;Samuel M. Nicaise;Kyana C. Van Houten;Felix Schmitt;Jared W. Schwede;Igor Bargatin
Publication Year: 2020,Page(s):637 - 644
Cited by: Papers (10)
Microgap thermionic energy converters and nanogap thermophotovoltaic devices can efficiently generate electricity from heat without using moving parts. However, converters that have diminutive spacings are difficult to operate and challenging to manufacture at scale. Previous efforts to establish small gaps, such as microfabricated pillars or nanobeads, have resulted in problems including excessiv...Show More
Nanostructured Spacers for Thermionic and Thermophotovoltaic Energy Converters
Matthew F. Campbell;Mohsen Azadi;Zhipeng Lu;Andy G. Eskenazi;Akshat Jain;Ji Won Bang;Philip G. Sieg;George A. Popov;Samuel M. Nicaise;Kyana C. Van Houten;Felix Schmitt;Jared W. Schwede;Igor Bargatin
Year: 2020 | Volume: 29 | Issue: 5
Miniaturized Electronic Circuit Design Challenges for Ingestible Devices
Nick Van Helleputte;Aniek J. G. Even;Francesca Leonardi;Stefano Stanzione;Minyoung Song;Carmine Garripoli;Wim Sijbers;Yao-Hong Liu;Chris Van Hoof
Publication Year: 2020,Page(s):645 - 652
Cited by: Papers (16)
The gastro-intestinal (GI) tract is a very important part of the human digestive system but remains largely inaccessible for unobtrusive monitoring. Ingestible electronic devices are a very interesting concept to address this need. This paper discusses the current state of ingestible electronic devices and explores the potential they hold to provide unprecedented insight by measuring several aspec...Show More
SeedEZTM Interdigitated Electrodes and Multifunctional Layered Biosensor Composites (MLBCs): A Paradigm Shift in the Development of In Vitro BioMicrosystems
Charles Michael Didier;Avra Kundu;James T. Shoemaker;Jelena Vukasinovic;Swaminathan Rajaraman
Publication Year: 2020,Page(s):653 - 660
Cited by: Papers (4)
We developed a new technology for the realization of composite biosensor systems, capable of measuring electrical and electrophysiological signals from electrogenic cells, using SeedEZTM 3D cell culture-scaffold material. This represents a paradigm-shift for BioMEMS processing; ‘Biology-Microfabrication’ versus the standard ‘Microfabrication-Biology’ approach. An Interdigitated Electrode (IDE) dev...Show More
AFM Microcantilever With a Collocated AlN Sensor-Actuator Pair: Enabling Efficient Q-Control for Dynamic Imaging
Publication Year: 2020,Page(s):661 - 668
Cited by: Papers (7)
This manuscript presents a novel microcantilever with an embedded piezoelectric sensor-actuator pair for dynamic atomic force microscopy (AFM). The transducer pair is constructed from a two-layered AlN stack. Stacking the piezoelectric transducers in this manner leads to a minimal feedthrough from actuation to sense electrode, granting a high dynamic range frequency response for dynamic mode AFM. ...Show More
Low Offset and Noise in High Biased GaN 2DEG Hall-Effect Plates Investigated With Infrared Microscopy
Karen M. Dowling;Tanya Liu;Hannah S. Alpert;Caitlin A. Chapin;Savannah R. Eisner;Ananth Saran Yalamarthy;Peter F. Satterthwaite;Helmut Köck;Udo Ausserlechner;Mehdi Asheghi;Kenneth E. Goodson;Debbie G. Senesky
Publication Year: 2020,Page(s):669 - 676
Cited by: Papers (10)
This article presents GaN two-dimensional electron gas (2DEG) Hall plates with low residual offset and noise at 3 V input bias. We studied devices made from three consecutive fabrication generations through current spinning offset measurements in a zero-field chamber. When operated above 1 V, the first-generation devices charted high residual offsets 1 mT. We reduced these residual offsets by thre...Show More
Low Offset and Noise in High Biased GaN 2DEG Hall-Effect Plates Investigated With Infrared Microscopy
Karen M. Dowling;Tanya Liu;Hannah S. Alpert;Caitlin A. Chapin;Savannah R. Eisner;Ananth Saran Yalamarthy;Peter F. Satterthwaite;Helmut Köck;Udo Ausserlechner;Mehdi Asheghi;Kenneth E. Goodson;Debbie G. Senesky
Year: 2020 | Volume: 29 | Issue: 5
Limits to Thermal-Piezoresistive Cooling in Silicon Micromechanical Resonators
James M. L. Miller;Haoshen Zhu;Subramanian Sundaram;Gabrielle D. Vukasin;Yunhan Chen;Ian B. Flader;Dongsuk D. Shin;Thomas W. Kenny
Publication Year: 2020,Page(s):677 - 684
Cited by: Papers (5)
We study thermal-piezoresistive cooling in silicon micromechanical resonators at large currents and high temperatures. Crossing a thermal transition region corresponds to a steep reduction in resonance frequency, an abrupt plateauing in the effective quality factor, and a large increase in thermomechanical fluctuations. Comparing measurements with simulations suggests that the second-order tempera...Show More
DLP 3D Printed “Intelligent” Microneedle Array (iμNA) for Stimuli Responsive Release of Drugs and Its in Vitro and ex Vivo Characterization
Avra Kundu;Parker Arnett;Arvind Bagde;Nilab Azim;Emmanuel Kouagou;Mandip Singh;Swaminathan Rajaraman
Publication Year: 2020,Page(s):685 - 691
Cited by: Papers (24)
We demonstrate a new fabrication technology to realize “intelligent”, transdermal, minimally invasive microneedle array (iμNA) by crosslinking a hydrogel, Polyethylene Glycol Diacrylate (PEGDA) by photo-polymerization using Digital Light Processing (DLP) based 3D printing. The photo-polymerization conditions have been optimized so that the mutually exclusive requirements of excellent mechanical st...Show More
Ring-Focusing Fresnel Acoustic Lens for Long Depth-of-Focus Focused Ultrasound With Multiple Trapping Zones
Publication Year: 2020,Page(s):692 - 698
Cited by: Papers (8)
This paper describes a novel acoustic transducer with dual functionality based on 1-mm-thick lead zirconate titanate (PZT) substrate with a modified air-cavity Fresnel acoustic lens on top. Designed to let ultrasound waves focus over an annular ring region, the lens generates a long depth-of-focus Bessel-like focal beam and multiple trapping zones based on quasi-Airy beams and bottle beams. With 2...Show More
Frequency Tunable Surface Acoustic Wave Actuators for Adjustable Pitch Diffraction Grating
Clifford F. Frez;M. Bulut Coskun;Valerie J. Scott;Yen-Hung Wu;Abigail Fraeman;Mina Rais-Zadeh
Publication Year: 2020,Page(s):699 - 705
Diffraction gratings are commonly used in optical instruments such as in spectrometers, monochromators, and wavelength division multiplexing devices. The diffraction efficiency is directly related to the ratio of the grating spacing or pitch to the wavelength of the light. In a sinusoidal grating (or holographic grating) the efficiency is generally lower than a blazed grating with a saw tooth prof...Show More
Hybrid and Passive Tissue-Anchoring Mechanism for Ingestible Resident Devices
Publication Year: 2020,Page(s):706 - 712
Cited by: Papers (10)
This work presents a hybrid tissue-anchoring mechanism that combines a pre-compressed microspring for autonomous actuation and a barbed microneedle (MN) for robust tissue anchoring with minimized preloading. The springmicroneedle unit (SMU) allows facile integration with potential ingestible resident systems to enable prolonged operation in the gastrointestinal (GI) tract (e.g. biomarker monitorin...Show More
Wireless Sensor-Integrated Platform for Localized Dissolved Oxygen Sensing in Bioreactors
Justin M. Stine;Luke A. Beardslee;Sangwook Chu;Sanwei Liu;Dana Motabar;William E. Bentley;Reza Ghodssi
Publication Year: 2020,Page(s):713 - 719
Cited by: Papers (4)
This work presents a miniaturized electrochemical sensor-integrated bioprocess monitoring pod (bPod) that wirelessly monitors local dissolved oxygen (DO) saturation within bioreactors in real-time. The system comprises a compact printed circuit board (PCB) that integrates a potentiostat analog-front-end (AFE) and a Bluetooth Low Energy (BLE) microcontroller with an electrochemical DO sensor. In si...Show More
Fabrication of Injectable Micro-Scale Opto- Electronically Transduced Electrodes (MOTEs) for Physiological Monitoring
Sunwoo Lee;Alejandro Javier Cortese;Aaron Mok;Chunyan Wu;Tianyu Wang;Ju Uhn Park;Conrad Smart;Shahaboddin Ghajari;Devesh Khilwani;Sanaz Sadeghi;Yanxin Ji;Jesse H. Goldberg;Chris Xu;Paul L. McEuen;Alyosha Christopher Molnar
Publication Year: 2020,Page(s):720 - 726
Cited by: Papers (22)
In vivo, chronic neural recording is critical to understand the nervous system, while a tetherless, miniaturized recording unit can render such recording minimally invasive. We present a tetherless, injectable micro-scale opto-electronically transduced electrode (MOTE) that is ~60μm × 30μm × 330μm, the smallest neural recording unit to date. The MOTE consists of an AlGaAs micro-scale light emittin...Show More
Fabrication of Injectable Micro-Scale Opto- Electronically Transduced Electrodes (MOTEs) for Physiological Monitoring
Sunwoo Lee;Alejandro Javier Cortese;Aaron Mok;Chunyan Wu;Tianyu Wang;Ju Uhn Park;Conrad Smart;Shahaboddin Ghajari;Devesh Khilwani;Sanaz Sadeghi;Yanxin Ji;Jesse H. Goldberg;Chris Xu;Paul L. McEuen;Alyosha Christopher Molnar
Year: 2020 | Volume: 29 | Issue: 5
A Hybrid Biomonitoring System for Gut-Neuron Communication
Ashley A. Chapin;Jinjing Han;Ta-Wen Ho;Jens Herberholz;Reza Ghodssi
Publication Year: 2020,Page(s):727 - 733
Cited by: Papers (1)
This work presents an integrated electrochemical and electrophysiological biomonitoring system, enabling the study of molecular signaling along the gut-brain-axis (GBA). In vitro gut cell cultures provide a controllable, accessible platform to study gut physiology. Similarly, the ex vivo crayfish abdominal nerve cord provides a model for the electrophysiological study of nerve signaling. For the f...Show More
Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography
Inês S. Garcia;Carlos Ferreira;Joana D. Santos;Marco Martins;Rosana A. Dias;Diogo E. Aguiam;Jorge Cabral;João Gaspar
Publication Year: 2020,Page(s):734 - 740
Cited by: Papers (17)
A 1D MEMS (Micro-Electro-Mechanical Systems) mirror for LiDAR applications, based on vertically asymmetric comb-drive electrostatic actuators, is presented in this work employing a novel fabrication process. This novel micromachining process combines typical SOI-based bulk micromachining and grayscale lithography, enabling the fabrication of combs actuators with asymmetric heights using a single l...Show More
A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films
Jialin Wang;Mingyo Park;Stefan Mertin;Tuomas Pensala;Farrokh Ayazi;Azadeh Ansari
Publication Year: 2020,Page(s):741 - 747
Cited by: Papers (102)
This work reports on the first demonstration of the frequency tuning and intrinsic polarization switching of film bulk acoustic resonators (FBARs), based on sputtered AlScN piezoelectric thin films with Sc/(Al + Sc) ratio of approx. 30%. A box-like ferroelectric hysteresis behavior of 900 nm-thick Al0.7Sc0.3N sputtered films is obtained, showing a coercive electric field at ~3 MV/cm. The fundament...Show More
A Flush-Mounted Dual-Axis Wall Shear Stress Sensor
Brett R. Freidkes;David A. Mills;William C. Patterson;Philip M. Fournier;Mark Sheplak
Publication Year: 2020,Page(s):748 - 754
Cited by: Papers (2)
This paper presents the fabrication, packaging, and calibration of a flush-mounted, dual-axis, differential capacitive wall shear stress sensor. The two-mask fabrication process produces a 7-mm die with a 2-mm by 2-mm floating element supported by eight, compliant crab-leg tethers. Taking advantage of backside wire bonds, the hydraulically smooth package is suitable for wind tunnel testing and is ...Show More
Micromechanical Switch-Based Zero-Power Chemical Detectors for Plant Health Monitoring
Sila Deniz Calisgan;Vageeswar Rajaram;Sungho Kang;Antea Risso;Zhenyun Qian;Matteo Rinaldi
Publication Year: 2020,Page(s):755 - 761
Cited by: Papers (19)
In this paper, for the first time we demonstrate zero-power volatile-organic-chemical (VOC) detectors based on micromechanical switches suitable for plant health monitoring. Differently from state-of-the-art active chemical sensors, the device presented here exploits a completely passive, chemically-sensitive switch based on a bimaterial micro-cantilever and a passive switch-based readout mechanis...Show More
A Scalable, Hierarchical Rib Design for Larger-Area, Higher-Porosity Nanoporous Membranes for the Implantable Bio-Artificial Kidney
Benjamin W. Chui;Nathan J. Wright;Jimmy Ly;David A. Maginnis;Tariq M. Haniff;Charles Blaha;William H. Fissell;Shuvo Roy
Publication Year: 2020,Page(s):762 - 768
Cited by: Papers (8)
Silicon nanoporous membranes provide the fundamental underlying technology for the development of an implantable bio-artificial kidney. These membranes, which are comprised of micromachined slit-pores that are nominally 10 nm wide, allow for high-efficiency blood filtration as well as immunoprotection for encapsulated cells. Our approach takes advantage of well-established semiconductor fabricatio...Show More
Fabrication and Demonstration of a Self-Adaptive Microvalve Array for Distributed Liquid Cooling in Microelectronic Interposers
Amrid Amnache;Gerard Laguna;Étienne Léveillé;Rajesh Pandiyan;Louis-Michel Collin;Montse Villarrubi;Simon Hamel;Jérôme Barrau;Luc Guy Fréchette
Publication Year: 2020,Page(s):769 - 775
Cited by: Papers (5)
We demonstrated the implementation and self-adaptive behavior of an array of thermostatic microvalves that locally control the water-cooling flow to prevent hot spots in microelectronics while minimizing the pumping power. This strategy enables the compact integration of multiple chips on an interposer without constraints of overheating or thermal cross talk. The performance of microfluidic cell a...Show More
Fabrication and Demonstration of a Self-Adaptive Microvalve Array for Distributed Liquid Cooling in Microelectronic Interposers
Amrid Amnache;Gerard Laguna;Étienne Léveillé;Rajesh Pandiyan;Louis-Michel Collin;Montse Villarrubi;Simon Hamel;Jérôme Barrau;Luc Guy Fréchette
Year: 2020 | Volume: 29 | Issue: 5
Multi-Layer Micro-Nanofluidic Device for Isolation and Capture of Extracellular Vesicles Derived From Liposarcoma Cell Conditioned Media
Prashanth Mohana Sundaram;Lucia Casadei;Gonzalo Lopez;Danielle Braggio;Gita Balakirsky;Raphael Pollock;Shaurya Prakash
Publication Year: 2020,Page(s):776 - 782
Cited by: Papers (8)
We report on isolation, capture, and subsequent elution for analysis of extracellular vesicles derived from human liposarcoma cell conditioned media, using a multi-layer micro-nanofluidic device operated with tangential flow separation. Our device integrates size-based separation followed by immunoaffinity-based capture of extracellular vesicles in the same device. For liposarcomas, this is the fi...Show More
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Carnegie Mellon University, Dept. of Electrical and Computer Engineering
Pittsburgh
USA
piazza@ece.cmu.eduContact Information
Editor-in-Chief
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Carnegie Mellon University, Dept. of Electrical and Computer Engineering
Pittsburgh
USA
piazza@ece.cmu.eduIEEE Account
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