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Matteo Rinaldi - IEEE Xplore Author Profile

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This letter reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) exploiting a highly-optimized Sezawa mode in 30% Scandium-doped Aluminum Nitride (ScAlN) on Silicon Carbide (SiC) and operating near 16 GHz. Experimental results demonstrate mechanical quality factors (Qm) as high as 380, Bode quality factors (QBode) approaching 500, electromechanical coupling coefficients (k2t) of 4.5%, ...Show More
This work reports on the first experimental characterization of the Quality Factor (Q) of the Cross-sectional Lamé Mode (CLM) in 30% sC-doped Aluminum Nitride (ScAlN) above the X-band. By utilizing three high-crystallinity ScAlN films with thicknesses of 100, 150, and 280 nm, as well as more than 300 Acoustic Delay Lines (ADL), the intrinsic material-based limitation of the Q of ScAlN in the 8-25 ...Show More
This work introduces a novel type of infrared (IR) sensor that enhances sensitivity by pairing plasmonic absorbers with Lamb Wave Acoustic Delay Lines (ADLs). This technique allows for the expansion of the absorber’s area beyond the constraints of the device’s geometry, providing additional degrees of freedom to further optimize IR sensing performance. The device achieved an IR absorption of appro...Show More
This work reports on a technology-agnostic and frequency-independent methodology combining a-priori modeling, Finite Element Analysis (FEA), and experimental results for the characterization of acoustic losses in interdigitated piezoelectric micro- and nano-electromechanical (M/NEMS) resonators. The proposed approach models the mechanical quality factor (Qm) and its dependency on piezoelectric (Qp...Show More
This work introduces a novel image recognition technique for the automatic detection of abnormally orientated grains (AOGs) in piezoelectric and ferroelectric thin films, with a specific focus on highly doped Scandium Aluminum Nitride (ScAlN). The algorithm accurately identifies and measures the grains on the substrate with pixel-level precision, facilitating precise calculations of the average ar...Show More
This work reports an acoustic solidly mounted resonator (SMR) at 18.64 GHz, among the highest operating frequencies reported. The device is built in scandium aluminum nitride (ScAlN) on top of silicon dioxide (SiO2) and tantalum pentoxide (Ta2O5) Bragg reflectors on silicon (Si) wafer. The stack is analyzed with X-ray reflectivity (XRR) and high-resolution X-ray diffraction (HRXRD). The resonator ...Show More
In this work, an on-chip Scandium Aluminum Nitride (ScAlN)-on-Silicon based mmWave meander line monopole antenna is presented. The device is co-designed and co-fabricated with an established, CMOS-compatible process flow developed for Microelectromechanical (MEMS) acoustic resonators, demonstrating the feasibility of multi-physics monolithic integration for mmWave wireless applications on piezo-on...Show More
This work presents the design, fabrication, and testing of X-Cut Lithium Niobate (LN) acoustic nanoelectrome-chanical (NEMS) Laterally Vibrating Resonators (LVRs) and Degenerate LVRs (d-LVRs) operating in the S0 (YZ30°) and SH0 (YZ-10°) modes between 2 to 16 GHz range, monolithically fabricated on a single chip. The NEMS topology is optimized to extend the aforementioned fundamental modes in the C...Show More
This work reports on the designing, manufacturing, and characterization of 18 GHz microacoustic 30% scandium aluminum nitride doped lamb wave Cross-Sectional Lamé Mode Resonators (CLMRs) for Ku band applications, with a specific focus on the next generation of radio frequency filters for 5G and satcom applications.Measured results highlight a 3 dB quality factor (Q3dB) as high as 180, a mechanical...Show More
This article presents the first prototype of a novel threshold sensing system operating in the radiofrequency (RF) range, capable of passively detecting and recording instances of temperature violations with high sensitivity and without the need of DC-biased memory devices. The system comprises a microfabricated hafnium zirconium oxide (HZO) ferroelectric varactor, a microfabricated lithium niobat...Show More
This work presents the design, fabrication, and testing of S0 mode YZ30° X-Cut Lithium Niobate Laterally Vibrating Resonators (LVRs) and degenerate Laterally Vibrating Resonators (d-LVRs) operating in the 3 to 16 GHz range for 5G applications. The resonator’s topology is optimized to extend the S0 mode in the C-, X-, and Ku-bands while preserving performance and mass-manufacturability. The devices...Show More
This work demonstrates the use of focusing interdigitated transducers (FIDTs) to generate confined S0 Lamb modes, in which they are captured and routed by acoustic waveguides. The waveguides demonstrate acoustic delay lines (ADLs) with 90-degree bends in suspended 30% scandium aluminum nitride (ScAlN) and allow for the characterization of bending losses across various waveguide widths. This work d...Show More
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at millimeter wave (mmWave) with high quality factor (Q) using platinum (Pt) electrodes. FBARs with combinations of Pt and aluminum (Al) electrodes, i.e., Al top – Al bottom, Pt top – Al bottom, Al top – Pt bottom, and Pt top – Pt bottom, are built to study the impact of electrodes. The FBAR w...Show More
We present an innovative class of piezoelectric–micromachined – ultrasonic – transducer (pMUT)-based Ultra-High-Frequency (UHF) subharmonic tags (SubHTs) for far-field sensing. The proposed system leverages the dynamics of a 20×20 36%-doped Scandium Aluminum Nitride (ScAlN) pMUT-array operating at 550 kHz and those of time-modulated circuit components to passively sense ultrasound from long distan...Show More
This work presents an analysis of the first mmWaves-operating Cross-sectional Lamé Mode Resonators (CLMRs), investigating the intrinsic quality factor limit of the technology. By leveraging the Finite Element Modeling-simulated energy distributions in the piezoelectric and metal layer, an accurate matching of theoretical and experimental quality factor is achieved, thus identifying the main source...Show More
This work reports the first demonstration and dispersion analysis of guided S0 Lamb modes in 30% scandium aluminum nitride (ScAlN) on sapphire (SoS). The fundamental Rayleigh and solidly mounted S0 Lamb mode are evaluated and compared in terms of electromechanical coupling as a function of film thickness with respect to wavelength. The propagation loss of each mode is also experimentally character...Show More
In this work, we demonstrate 30% Scandium-doped Aluminum Nitride (ScAlN) nanoacoustic Cross-sectional Lamé Mode Resonators (CLMRs) up to 20 GHz of operation (K-band). The devices are fabricated on 200 mm wafers with a simple 3-mask micro-machining process and feature interdigitated electrodes’ finger widths ranging from 75 to 144 nm. Among them, we showcase a groundbreaking CLMR operating at 18.17...Show More
This article presents the first experimental demonstration of a Scandium Aluminum Nitride (ScAlN) MEMS resonant infrared (IR) detector for chemical sensing. The device employs a stack of 30%-doped ScAlN (350 nm) and AlN (250 nm) to respectively define the resonator and the IR-selective metamaterial layer, targeting an absorption wavelength close to 5 μm - typical for IR spectroscopy applications. ...Show More
This paper introduces an active filter balun and frequency doubler intended for an on-chip parametric phase noise reduction system. The 2.4 GHz balun is designed with inductor-capacitor (LC) tanks to provide narrowband filtering. This architecture also leads to low amplitude and phase errors of the differential outputs by relying on the matching of passive devices in the two branches. The frequenc...Show More
This work presents a novel dual-mode frequency-based pressure sensor, which implements a Piezoelectric Mi-cromachined Ultrasonic Transducer (pMUT) operating in the fundamental flexural mode around 1.4 MHz and in the S1bulk mode around 4.2 GHz. The sensor's active layer is fabricated with Scandium-doped Aluminum Nitride (ScAIN) thin film, with a doping level of 36%. The device's behavior is monitor...Show More
In this work, an on-chip, bulk X-cut Lithium Niobate (LN) platform for the fabrication of monolithical integrated radio frequency (RF) front-ends passives and sensors is presented. Lithographically defined shear horizontal (SH0) Leaky Surface Acoustic Wave (LSAW) resonators and Electrically Small Antennas (ESA) are co-designed and manufactured on the same substrate with a single-step fabrication p...Show More
Scandium-doped aluminum nitride (ScAlN) is an emergent piezoelectric material for acoustic wave devices, exhibiting higher electromechanical coupling $\left( {k_t^2} \right)$ compared to undoped AlN. The S0 Lamb mode in suspended ScAlN films theoretically supports $k_t^2$ up to ~40%, demonstrating comparable performance to thin film lithium niobate. The high phase velocity of the S0 mode enables g...Show More
This work presents the first X-band operating Acoustic Delay Lines (ADL) in 30% Sc-doped Aluminum Nitride (ScAIN) employing a Cross-sectional Lamé Mode of vibration. Devices operating at 8.3, 9.4, and 10.15 GHz, impedance matched to 50, 200, and 500 Ω, and relying on a single top electrode excitation were designed and fabricated on a high-crystallinity piezoelectric thin film. The delay lines exhi...Show More
This work reports a millimeter wave (mmWave) thin-film bulk acoustic resonator (FBAR) in sputtered scandium aluminum nitride (ScAlN). This paper identifies challenges of frequency scaling sputtered ScAlN into mmWave and proposes a stack and new fabrication procedure with a sputtered Sc0.3 Al0.7 N on Al on Si carrier wafer. The resonator achieves electromechanical coupling ( ${k} ^{2}$ ) of 7.0% an...Show More
In this work, X-cut Lithium Niobate MEMS resonators are fabricated and tested to further identify and confirm the impact of design features on the rise of spurious modes. Building upon previous work, where a neural network identified the key features to be the number of electrode finger pairs, electrode length, and anchor width, 432 resonators were designed and fabricated to experimentally test an...Show More