Loading [MathJax]/extensions/MathMenu.js
Inês S. Garcia - IEEE Xplore Author Profile
Subscribe
ADVANCED SEARCH

Author details

< Back

Inês S. Garcia

Publications
4
Citations
23
Publications by Year
20192023
Co-Authors:
Show All Co-Authors (17)
Image of author Inês S. Garcia

Inês S. Garcia

Affiliation

International Iberian Nanotechnology Laboratory (INL), Braga, Portugal

Publication Topics

Biography

Inês S. Garcia received the M.Sc. degree in industrial electronics and computers engineering from the University of Minho, Guimarães, Portugal, in 2019, where she is currently pursuing the Ph.D. degree in electronics and computers engineering.,She is currently a Micro-Optical-Electro-Mechanical Systems (MOEMS) Research Engineer with the Micro and Nanofabrication Department, INL. She has a strong background in automation, control and robotics, and microtechnologies. She joined, in 2018, the Microfabrication and Exploratory Nanotechnology Group, International Iberian Nanotechnology Laboratory (INL), where she developed her master’s thesis on High Precision MEMS Accelerometers for Microsatellites. Her research is focused on the design, fabrica...
Publications
4
Citations
23
Publications by Year
20192023
Co-Authors:
Show All Co-Authors (17)
Author's Published Works

Showing 1-4 of 4 results

  • Sort

Filter Results

Show

Sort By

Results

Ultra-High Sensitivity Pull-In Time Mems Accelerometer for Satellite Gravimetry

Inês S. Garcia;Dimitri E. Santos;José B. Queiroz;João T. Da Encarnação;Tiago Hormigo;Jorge Cabral;Filipe S. Alves;Rosana A. Dias

2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Year: 2023 | Conference Paper |
Satellite gravimetry applications require sub-ng acceleration resolution at frequencies below 100 mHz, demanding low-noise (mechanical-thermal, 1/f and electronic) and high-sensitivity MEMS sensors. The electrostatic pull-in time-based transduction enables very high sensitivities (75 μs/(μm/s2) demonstrated) compared to direct capacitive transduction. The high-resolution requirement calls for larg...Show More

Ultra-High Sensitivity Pull-In Time Mems Accelerometer for Satellite Gravimetry

Inês S. Garcia;Dimitri E. Santos;José B. Queiroz;João T. Da Encarnação;Tiago Hormigo;Jorge Cabral;Filipe S. Alves;Rosana A. Dias

Year: 2023 | Conference Paper |

Double-Proof Mass SOI-Based Matryoshka-Like 3-Axis MEMS Accelerometer

Inês S. Garcia;José Fernandes;José B. Queiroz;Carlos Calaza;José Moreira;Rosana A. Dias;Filipe S. Alves

2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Year: 2023 | Conference Paper |
MEMS accelerometers have been around for many years and became a key element to different applications, such as inertial navigation, or geophysical sensing. Some of those applications require multi-axis sensing. To address the challenge of measuring accelerations in 3 axis with comparable transduction, a novel SOI-based 3 axis MEMS accelerometer based on hierarchical structures is presented, featu...Show More

Double-Proof Mass SOI-Based Matryoshka-Like 3-Axis MEMS Accelerometer

Inês S. Garcia;José Fernandes;José B. Queiroz;Carlos Calaza;José Moreira;Rosana A. Dias;Filipe S. Alves

Year: 2023 | Conference Paper |

Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography

Inês S. Garcia;Carlos Ferreira;Joana D. Santos;Marco Martins;Rosana A. Dias;Diogo E. Aguiam;Jorge Cabral;João Gaspar

Journal of Microelectromechanical Systems
Year: 2020 | Volume: 29, Issue: 5 | Journal Article |
Cited by: Papers (17)
A 1D MEMS (Micro-Electro-Mechanical Systems) mirror for LiDAR applications, based on vertically asymmetric comb-drive electrostatic actuators, is presented in this work employing a novel fabrication process. This novel micromachining process combines typical SOI-based bulk micromachining and grayscale lithography, enabling the fabrication of combs actuators with asymmetric heights using a single l...Show More

Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography

Inês S. Garcia;Carlos Ferreira;Joana D. Santos;Marco Martins;Rosana A. Dias;Diogo E. Aguiam;Jorge Cabral;João Gaspar

Year: 2020 | Volume: 29, Issue: 5 | Journal Article |

Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction

Inês S. Garcia;Eurico E. Moreira;Rosana A. Dias;João Gaspar;Filipe S. Alves;Luís A. Rocha

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Year: 2019 | Conference Paper |
Cited by: Papers (6)
A very high-resolution SOI (silicon-on-insulator) MEMS (Micro-Electro-Mechanical Systems) accelerometer for geodetic space grade applications using pull-in time measurements is presented here. Parallelplates implemented in the handle-layer are used to provide the necessary squeeze-film damping, while increasing the effective-mass. Large mass (126 mg) devices with low-Q (quality factor of 0.53) hav...Show More

Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction

Inês S. Garcia;Eurico E. Moreira;Rosana A. Dias;João Gaspar;Filipe S. Alves;Luís A. Rocha

Year: 2019 | Conference Paper |

IEEE Account

Purchase Details

Profile Information

Need Help?

A not-for-profit organization, IEEE is the world's largest technical professional organization dedicated to advancing technology for the benefit of humanity.
© Copyright 2025 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.