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Chang Auck Choi - IEEE Xplore Author Profile
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Chang Auck Choi

Also published under: Chang-Auck Choi

Publications
15
Citations
65
Publications by Year
19992009
Co-Authors:
Show All Co-Authors (46)
Image of author Chang Auck Choi

Chang Auck Choi

Also published under: Chang-Auck Choi

Affiliation

Advanced i-MEMS team, Electrical and Telecommunications Research Institute, South Korea

Publication Topics

Biography

Chang-Auck Choi was born in Daegu, Korea, in 1954. He received the M.S. and Ph.D. degrees in electronic engineering from Kyungpook National University, Taegu, Korea, in 1988 and 1999, respectively.,Since 1980, he has been with the Electronics and Telecommunications Research Institute (ETRI), Daejeon, Korea, where he is involved with the development of MEMS devices and advanced semiconductor process technology. He is currently the Director of the IT-BT Technology Development Department, ETRI. His current research involves microoptoelectromechanical systems (MOEMS), semiconductor sensors, and bio-MEMS.(Based on document published on 7 November 2005).
Publications
15
Citations
65
Publications by Year
19992009
Co-Authors:
Show All Co-Authors (46)
Author's Published Works

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Chip scale packaging with surface mountable solder ball terminals for microsensors

Ahra Lee;SangChul Lee;Sungsik Lee;Chang Han Je;Sunghae Jung;Myoung-Lae Lee;Gunn Hwang;Byoung-Gon Yu;Chang Auck Choi

2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Year: 2009 | Conference Paper |
Cited by: Papers (2)
This paper presents a simple and low-cost flip chip bumping method with vertical feedthroughs for MEMS WLCSP. The vertical feedthroughs are fabricated on glass wafer using sand-blasting, and these provide inherent aligning jig for micro-ball arrangement. The experimental evaluations using MEMS accelerometer are also presented. The proposed method can be a more cost-effective solution by eliminatin...Show More

Chip scale packaging with surface mountable solder ball terminals for microsensors

Ahra Lee;SangChul Lee;Sungsik Lee;Chang Han Je;Sunghae Jung;Myoung-Lae Lee;Gunn Hwang;Byoung-Gon Yu;Chang Auck Choi

Year: 2009 | Conference Paper |

Sputtered silicon antimony thin film for the infrared detection layer of microbolometer

Hojun Ryu;Sang Hoon Cheon;Seong Mok Cho;Woo Seok Yang;Byoung Gon Yu;Chang Auck Choi;Myung Lae Lee;Se In Kwon

SENSORS, 2008 IEEE
Year: 2008 | Conference Paper |
Cited by: Patents (2)
We have studied on the sputtered silicon antimony thin film for bolometric materials of mid-IR range application. In order to obtain high detectivity of infrared sensors, the infrared detection materials which have been using today as a resistor must have a high temperature coefficient of resistance (TCR) and low noise. We fabricated silicon films and their alloy films by sputtering and plasma-enh...Show More

Sputtered silicon antimony thin film for the infrared detection layer of microbolometer

Hojun Ryu;Sang Hoon Cheon;Seong Mok Cho;Woo Seok Yang;Byoung Gon Yu;Chang Auck Choi;Myung Lae Lee;Se In Kwon

Year: 2008 | Conference Paper |

Sensitivity tunable capacitive type micro accelerometer

Chang Han Je;Sungsik Lee;Myung Lae Lee;Sunghae Jung;Ahra Lee;Gunn Hwang;Byoung Gon Yu;Chang Auck Choi

SENSORS, 2008 IEEE
Year: 2008 | Conference Paper |
Cited by: Papers (2)
In this paper, we present a novel sensitivity tunable capacitive type micro accelerometer which could adjust its sensitivity. The previous bulk-micromachined accelerometer is hard to make a pattern which is smaller than 1um with high aspect ratio because of ICP etching errors such as loading effect and footing. In this paper, by making movable ground electrodes which have MEMS actuators, we presen...Show More

Sensitivity tunable capacitive type micro accelerometer

Chang Han Je;Sungsik Lee;Myung Lae Lee;Sunghae Jung;Ahra Lee;Gunn Hwang;Byoung Gon Yu;Chang Auck Choi

Year: 2008 | Conference Paper |

Sub-ppm detection of gold nanoparticle transducer toward carboxyl functionality

Young Jun Kim;S.M. Cho;Hyeon-Bong Pyo;Chang Auck Choi

SENSORS, 2005 IEEE
Year: 2005 | Conference Paper |
Cited by: Papers (2)
Gold nanoparticles functionalized with methyl 3-mercaptopropionate (MMP) were synthesized and used as sensor materials to detect acetic acid in the sub-ppm range. The success of the MMP gold nanoparticles was confirmed by high resolution TEM and FTIR. The average diameter was characterized by TEM to be 3.1 nm. Transducer film was formed on a glass or a silicon substrate mounted with interdigitated...Show More

Sub-ppm detection of gold nanoparticle transducer toward carboxyl functionality

Young Jun Kim;S.M. Cho;Hyeon-Bong Pyo;Chang Auck Choi

Year: 2005 | Conference Paper |

Monolithic electronic nose system fabricated by post CMOS micromachining

S.M. Cho;Sang Choon Ko;Seung-Chul Ha;Yong Shin Kim;Young Jun Kim;Yoonseok Yang;Hyeon-Bong Pyo;Chang Auck Choi

SENSORS, 2005 IEEE
Year: 2005 | Conference Paper |
Cited by: Papers (1)
A monolithic electronic nose system, which has 12 independent channels, was fabricated by post CMOS micromachining process. Read-out integrated circuits were fabricated with the standard CMOS processes with design rule of 0.8 mum. And, the MEMS parts of the electronic nose were fabricated by hybrid etching, composed of bulk micromachining with TMAH (tetramethy lammonium hydroxide) and deep dry etc...Show More

Monolithic electronic nose system fabricated by post CMOS micromachining

S.M. Cho;Sang Choon Ko;Seung-Chul Ha;Yong Shin Kim;Young Jun Kim;Yoonseok Yang;Hyeon-Bong Pyo;Chang Auck Choi

Year: 2005 | Conference Paper |

A low-loss single-pole six-throw switch based on compact RF MEMS switches

Jaewoo Lee;Chang Han Je;Sungweon Kang;Chang-Auck Choi

IEEE Transactions on Microwave Theory and Techniques
Year: 2005 | Volume: 53, Issue: 11 | Journal Article |
A low-loss single-pole six-throw (SP6T) switch using very compact metal-contact RF microelectromechanical system (MEMS) series switches is presented. The metal-contact MEMS switch has an extremely compact active area of 0.4 mm /spl times/ 0.3 mm, thus permitting the formation of an SP6T MEMS switch into the RF switch with a total area of 1 mm/sup 2/. The MEMS switch shows an effective spring const...Show More

A low-loss single-pole six-throw switch based on compact RF MEMS switches

Jaewoo Lee;Chang Han Je;Sungweon Kang;Chang-Auck Choi

Year: 2005 | Volume: 53, Issue: 11 | Journal Article |

A single-pole 6-throw (SP6T) antenna switch using metal-contact RF MEMS switches for multi-band applications

Jaewoo Lee;Chang-Han Je;Seongweon Kang;Chang-Auck Choi

IEEE MTT-S International Microwave Symposium Digest, 2005.
Year: 2005 | Conference Paper |
Cited by: Papers (2)
A single-pole 6-throw (SP6T) antenna switch using metal-contact RF micro-electro-mechanical system (MEMS) series switches has been developed for multi-band applications. The fabricated metal-contact MEMS switch with a broad signal line gap of 140 /spl mu/m shows a very high isolation loss of -51 dB at 2 GHz because its center-wedge (CW) can control a membrane stiction problem due to the anchor rol...Show More

A single-pole 6-throw (SP6T) antenna switch using metal-contact RF MEMS switches for multi-band applications

Jaewoo Lee;Chang-Han Je;Seongweon Kang;Chang-Auck Choi

Year: 2005 | Conference Paper |

Diversifying chemical selectivity using mixed-ligand gold nanoparticles

Young Jun Kim;S.M. Cho;Hyeon-Bong Pyo;Chang-Auck Choi

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
Year: 2005 | Conference Paper |
Cited by: Papers (1)
A novel method for systematic variation of chemical selectivity is introduced using mixed-ligand gold nanoparticles. We have shown that altering the composition of ligand molecules attached on the nanoparticle surface affected interaction of the nanoparticle sensors with the analyte vapors. A gold nanoparticle flinctionalized with 4-methylbenzenethiol (4-MBT, -SC/sub 6/H/sub 4/CH/sub 3/) was synth...Show More

Diversifying chemical selectivity using mixed-ligand gold nanoparticles

Young Jun Kim;S.M. Cho;Hyeon-Bong Pyo;Chang-Auck Choi

Year: 2005 | Volume: 2 | Conference Paper |

Wafer-level fabrication of polymer microsensors with integrated heat control

Dae-Sik Lee;Haesik Yang;Kwang Hyo Chung;Se Ho Park;Hyeon-Bong Pyo;Chang Auck Choi

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
Year: 2005 | Conference Paper |
This paper described a novel wafer-level fabrication of polymer microsensors on the injection-molded thin polymer membrane with integrated heat control by conventional semiconductor processing techniques including standard photolithographic methods. A COC 5-in. wafer (1 mm thickness) is fabricated using injection molding method, in which polymer membranes (ca. 130 /spl mu/m thick and 3 mm /spl tim...Show More

Wafer-level fabrication of polymer microsensors with integrated heat control

Dae-Sik Lee;Haesik Yang;Kwang Hyo Chung;Se Ho Park;Hyeon-Bong Pyo;Chang Auck Choi

Year: 2005 | Volume: 2 | Conference Paper |

A π Small-Signal Model of MEMS Series Switches Based on the Parameter- Extraction Method

Jaewoo Lee;Woo-Seok Yang;Changhee Hyoung;Sungweon Kang;Chang-Auck Choi

2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)
Year: 2004 | Conference Paper |
A novel π small-signal model of MEMS series switches is presented based on a parameter-extraction method, which can determine a fringing capacitance (C_f) in the end of each signal line as well as a contact resistance (R_c). For an on-state modeling, the average error of S₁₁ for the π model is 5.1% in the range of 5~35 GHz, whereas that of the conventional model of two-port series-impedance withou...Show More

A π Small-Signal Model of MEMS Series Switches Based on the Parameter- Extraction Method

Jaewoo Lee;Woo-Seok Yang;Changhee Hyoung;Sungweon Kang;Chang-Auck Choi

Year: 2004 | Conference Paper |

Design and parameter-extraction based small-signal modeling of a novel center-anchor MEMS series switch

Jaewoo Lee;Woo-Seok Yang;Sungweon Kang;Chang-Auck Choi

34th European Microwave Conference, 2004.
Year: 2004 | Conference Paper |
Cited by: Papers (2)
A novel center-anchor MEMS series switch is presented in this paper. A signal-line gap of 270 um, which is two or more times broader than that of a conventional MEMS switch, is achieved, constituting a substantial improvement of the isolation characteristic. This is attributed to the formation of a broad gap by the centeranchor, which sufficiently limits off-state coupling. The measured isolation ...Show More

Design and parameter-extraction based small-signal modeling of a novel center-anchor MEMS series switch

Jaewoo Lee;Woo-Seok Yang;Sungweon Kang;Chang-Auck Choi

Year: 2004 | Volume: 3 | Conference Paper |

Novel lithography process for extreme deep trench by using laminated negative dry film resist

Moon-Youn Jung;Won Ick Jang;Chang Auck Choi;Myung Rae Lee;Chi Hoon Jun;Youn Tae Kim

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest
Year: 2004 | Conference Paper |
For the fabrication of MEMS(micro electro mechanical system) devices such as HAR(high-aspect-ratio) microstructures with an extreme deep trench, a novel lithography method was newly developed in this study. In the case of the deep trench, the liquid photoresist is not or very thinly coated at edge parts of the trench boundary. And, if a very thick resist coated, it is nearly impossible to develop ...Show More

Novel lithography process for extreme deep trench by using laminated negative dry film resist

Moon-Youn Jung;Won Ick Jang;Chang Auck Choi;Myung Rae Lee;Chi Hoon Jun;Youn Tae Kim

Year: 2004 | Conference Paper |

A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

Dooyoung Hah;Chang-Auck Choi;Chi-Hoon Jun;Youn Tae Kim

2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682)
Year: 2003 | Conference Paper |
Cited by: Papers (1)
A self-aligned vertical comb-drive actuator fabricated using surface micromachining is presented. One- and two-axis tilt scanning micromirrors with the actuators were fabricated and tested. A mechanical tilt angle of /spl plusmn/1.4/spl deg/ at 66 V/sub DC/ was achieved for a 1-mm-diameter micromirror.Show More

A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

Dooyoung Hah;Chang-Auck Choi;Chi-Hoon Jun;Youn Tae Kim

Year: 2003 | Conference Paper |

Packaging technology for wavelength tunable filter based on optical MEMS

Yong-Sung Eom;Jong-Hyun Lee;Byung-Suk Choi;Jong-Deog Kim;Ho-Gyeong Yun;Kwang-Seong Choi;Jong-Tae Moon;Myung-Lae Lee;Chang-Auck Choi;Chi-Hoon Jun

2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682)
Year: 2003 | Conference Paper |
One of the key components for the WDM optical communication is a wavelength tunable filter. The packaging technology of the tunable filter with Fabry-Perot cavity based on optical MEMS is investigated for the low power consumption and mass production. The flip chip process with Au-20(wt.%)Sn solder was conducted to integrate two DBR mirrors in parallel with a constant distance for the simple desig...Show More

Packaging technology for wavelength tunable filter based on optical MEMS

Yong-Sung Eom;Jong-Hyun Lee;Byung-Suk Choi;Jong-Deog Kim;Ho-Gyeong Yun;Kwang-Seong Choi;Jong-Tae Moon;Myung-Lae Lee;Chang-Auck Choi;Chi-Hoon Jun

Year: 2003 | Conference Paper |

A novel angular rate sensor employing flexural plate wave

Chang Seung Lee;Kwangsoo No;Dang Moon Wee;Jong Hyun Lee;Chang Auck Choi

1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027)
Year: 1999 | Conference Paper |
Cited by: Papers (3)
We designed and fabricated the silicon micromachined flexural plate wave actuator based on piezoelectric PbZrxTi1-xO3 (PZT) thin films for use in angular rate sensor. The working principles of the angular rate sensor utilizing the wave were investigated.Show More

A novel angular rate sensor employing flexural plate wave

Chang Seung Lee;Kwangsoo No;Dang Moon Wee;Jong Hyun Lee;Chang Auck Choi

Year: 1999 | Volume: 1 | Conference Paper |

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