This paper presents a simple and low-cost flip chip bumping method with vertical feedthroughs for MEMS WLCSP. The vertical feedthroughs are fabricated on glass wafer using sand-blasting, and these provide inherent aligning jig for micro-ball arrangement. The experimental evaluations using MEMS accelerometer are also presented. The proposed method can be a more cost-effective solution by eliminatin...Show More
A new type of a slot antenna in which a slot is formed in wound-type around a dielectric substrate is proposed. In comparison with a conventional meander slot antenna, the proposed antenna has a wider bandwidth and smaller size. The proposed antenna has been designed on a gallium arsenide (GaAs) substrate and fabricated by integrated circuit process for the integration of the antenna with active c...Show More
We propose a wound-type slot antenna having wide bandwidth and small size. In the antenna, a parasitic slot, which is gap-coupled to the main slot and resonates with the main slot at an adjacent frequency, can be formed compactly without increase of the antenna size, which makes a distinction between the proposed antenna and the conventional meander slot antenna. The antenna has been designed on a...Show More
