IIB-5 ultrashallow p⁺-n junctions suitable for VLSI CMOS

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First Page of the Article

Published in: IEEE Transactions on Electron Devices ( Volume: 32, Issue: 11, November 1985)

Page(s): 2532 - 2533

Date of Publication: 30 November 1985

DOI: 10.1109/T-ED.1985.22319

First Page of the Article

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