I. Introduction
Accumulation-Mode metal–oxide–semiconductor (MOS) varactors have become increasingly popular in silicon RF CMOS phase-locked loop (PLL) circuits [1], [2]. They are used in the voltage-controlled oscillator (VCO) where a wide oscillation range is desired. Requirements for a CMOS VCO are low phase noise, low power consumption, and a wide tuning range [3]. On semiconductive silicon substrates, electrical disturbances can travel between subcircuits on the die, impacting the VCO's noise performance. While a substrate voltage normally has a deleterious effect, in this case it is used to improve the performance. This paper details the effect of using a substrate voltage to tune an accumulation-mode MOS varactor. Section II covers the device design while Section III discusses the varactor's operation. In Section IV, measurements of a substrate voltage-tuned varactor are incorporated into a VCO design. Section V summarizes the results. Cross section of the accumulation-mode MOS varactor.