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Ultrathin gate oxide CMOS on [111] surface-oriented Si substrate | IEEE Journals & Magazine | IEEE Xplore

Ultrathin gate oxide CMOS on [111] surface-oriented Si substrate


Abstract:

The properties of ultrathin gate oxides in the direct-tunneling regime and the characteristics of the related CMOS transistors on a [111] surface-oriented Si substrate we...Show More

Abstract:

The properties of ultrathin gate oxides in the direct-tunneling regime and the characteristics of the related CMOS transistors on a [111] surface-oriented Si substrate were investigated and compared with those on a [100] substrate for the first time. It was confirmed that low field mobility of n-MOSFETs on the [111] substrate is smaller than that on the [100] substrate and that of p-MOSFETs on [111] is larger than that on [100] until the direct-tunneling gate oxide regime. It has been found that most of the electrical properties of MOSFETs, with the notable exception of mobility, become almost identical for [100] and [111] substrates when the oxide thickness is reduced to less than 2.0 nm. Some of the properties are quite different between the two substrates for the thicker oxide case. It has been found that the reliability of hot carrier injection and time-dependent dielectric breakdown (TDDB) of the oxides and MOSFETs on the [111] substrate is slightly better than that on the [100] substrate. In addition, the characteristics and reliability of oxides and MOSFETs on a wafer tilted 4/spl deg/ from [100] axis were investigated. It was found that there are few differences in the mobility between [100] and [100] 4/spl deg/ off substrates for both n- and p-MOSFET cases. The reliability of oxides or MOSFETs on the wafer was identical to that on normal [100] substrate. These results suggest that ultrathin gate oxide MOSFETs on Si surfaces with various orientations are likely to have practical applications. This is good news for possible future new structures of MOSFETs such as vertical or three-dimensional (3-D) MOSFETs.
Published in: IEEE Transactions on Electron Devices ( Volume: 49, Issue: 9, September 2002)
Page(s): 1597 - 1605
Date of Publication: 07 November 2002

ISSN Information:

Author image of H.S. Momose
Toshiba Corporation, Yokohama, Japan
Hisayo Sasaki Momose (M'94–SM'00) was born in Gifu, Japan. She received the M.S. degree in chemistry from Ochanomizu Women's University, Tokyo, Japan, in 1984.
In 1984, she joined the Semiconductor Device Engineering Laboratory, Toshiba Corporation, Kawasaki, Japan, where she engaged in the development of static RAM and CMOS/Bi-CMOS logic LSIs and the research of hot-carrier reliability of CMOS and BiCMOS devices. In 1989,...Show More
Hisayo Sasaki Momose (M'94–SM'00) was born in Gifu, Japan. She received the M.S. degree in chemistry from Ochanomizu Women's University, Tokyo, Japan, in 1984.
In 1984, she joined the Semiconductor Device Engineering Laboratory, Toshiba Corporation, Kawasaki, Japan, where she engaged in the development of static RAM and CMOS/Bi-CMOS logic LSIs and the research of hot-carrier reliability of CMOS and BiCMOS devices. In 1989,...View more
Author image of T. Ohguro
Toshiba Corporation, Yokohama, Japan
Tatsuya Ohguro was born in Aichi, Japan, on August 23, 1963. He received the B.S. and M.S. degrees in physics from Hokkaido University, Sapporo, Japan, in 1987 and 1989, respectively.
In 1989, he joined Toshiba Corporation, where he has been engaged in the research and development of advanced CMOS analog and logic devices at the Microelectronics Engineering Laboratory, Toshiba Corporation, Kawasaki, Japan. Since April 2002...Show More
Tatsuya Ohguro was born in Aichi, Japan, on August 23, 1963. He received the B.S. and M.S. degrees in physics from Hokkaido University, Sapporo, Japan, in 1987 and 1989, respectively.
In 1989, he joined Toshiba Corporation, where he has been engaged in the research and development of advanced CMOS analog and logic devices at the Microelectronics Engineering Laboratory, Toshiba Corporation, Kawasaki, Japan. Since April 2002...View more
Author image of S.-I. Nakamura
Toshiba Corporation, Yokohama, Japan
Shin-ichi Nakamura was born in Tottori, Japan, on November 18, 1951.
In 1970, he joined the Research and Development Center, Toshiba Corporation, Kanagawa, Japan, where he has been working on the development of advanced materials of nuclear power. Since 1986, he has been engaged in the characterization of advanced materials and ULSI devices by transmission electron microscope.
Mr. Nakamura is a member of the Japan Institute...Show More
Shin-ichi Nakamura was born in Tottori, Japan, on November 18, 1951.
In 1970, he joined the Research and Development Center, Toshiba Corporation, Kanagawa, Japan, where he has been working on the development of advanced materials of nuclear power. Since 1986, he has been engaged in the characterization of advanced materials and ULSI devices by transmission electron microscope.
Mr. Nakamura is a member of the Japan Institute...View more
Author image of Y. Toyoshima
Toshiba Corporation, Yokohama, Japan
Yoshiaki Toyoshima (M'91) received the B.S. degree in electrical engineering from Waseda University, Tokyo Japan, in 1981.
In 1984, he joined Semiconductor Device Engineering Laboratory, Toshiba Corporation, Kawasaki, Japan. He has been engaged in CMOS device design and process integration. He is currently working on development of advanced CMOS in the SoC Research and Development Center, Toshiba Corporation Semiconductor ...Show More
Yoshiaki Toyoshima (M'91) received the B.S. degree in electrical engineering from Waseda University, Tokyo Japan, in 1981.
In 1984, he joined Semiconductor Device Engineering Laboratory, Toshiba Corporation, Kawasaki, Japan. He has been engaged in CMOS device design and process integration. He is currently working on development of advanced CMOS in the SoC Research and Development Center, Toshiba Corporation Semiconductor ...View more
Author image of H. Ishiuchi
Toshiba Corporation, Yokohama, Japan
Hidemi Ishiuchi (M'86) received the B.S. and M.S. degrees in physics from the University of Tokyo, Tokyo, Japan, in 1978 and 1980, respectively.
He joined Toshiba Corporation, Yokohama, Japan, in 1980, where he was working on DRAM development. From 1988 to 1989, he has been at Stanford University, Stanford, CA, as a Visiting Scholar studying BiCMOS technologies. From 1993 to 1995, he was a member of the 256 Mb DRAM Joint D...Show More
Hidemi Ishiuchi (M'86) received the B.S. and M.S. degrees in physics from the University of Tokyo, Tokyo, Japan, in 1978 and 1980, respectively.
He joined Toshiba Corporation, Yokohama, Japan, in 1980, where he was working on DRAM development. From 1988 to 1989, he has been at Stanford University, Stanford, CA, as a Visiting Scholar studying BiCMOS technologies. From 1993 to 1995, he was a member of the 256 Mb DRAM Joint D...View more
Author image of H. Iwai
Tokyo Institute of Technology, Yokohama, Japan
Hiroshi Iwai (A'79–SM'93–F'97) was born in Tokyo, Japan, on April 25, 1949. He received the B.E. and Ph.D. degrees in electrical engineering from the University of Tokyo, Japan, in 1972 and 1992, respectively.
In 1973, he joined the Research and Development Center, Toshiba Corporation, Kawasaki, Japan, where he developed the first generation of Toshiba's NMOS LSI technology. From 1978 to 1980, he was also associated with N...Show More
Hiroshi Iwai (A'79–SM'93–F'97) was born in Tokyo, Japan, on April 25, 1949. He received the B.E. and Ph.D. degrees in electrical engineering from the University of Tokyo, Japan, in 1972 and 1992, respectively.
In 1973, he joined the Research and Development Center, Toshiba Corporation, Kawasaki, Japan, where he developed the first generation of Toshiba's NMOS LSI technology. From 1978 to 1980, he was also associated with N...View more

I. Introduction

For high-speed logic applications, suppression of the power consumption is very important and thus supply voltage should be reduced at every new generation. In order to realize high performance despite a low supply voltage, gate oxide thickness has to be reduced continuously. In fact, 2.0 nm–1.5 nm SiO2 gate MOSFETs have already been demonstrated for high-end microprocessor products. Furthermore, it has been suggested that even 1.6–1.1 nm gate SiO2 could be used for 45-nm gate length MOSFETs in 100-nm technology node [1].

Author image of H.S. Momose
Toshiba Corporation, Yokohama, Japan
Hisayo Sasaki Momose (M'94–SM'00) was born in Gifu, Japan. She received the M.S. degree in chemistry from Ochanomizu Women's University, Tokyo, Japan, in 1984.
In 1984, she joined the Semiconductor Device Engineering Laboratory, Toshiba Corporation, Kawasaki, Japan, where she engaged in the development of static RAM and CMOS/Bi-CMOS logic LSIs and the research of hot-carrier reliability of CMOS and BiCMOS devices. In 1989, she joined the ULSI Research Center, Toshiba Corporation, where she engaged in the development of logic and analog CMOS devices and researched nitrided oxide gate CMOS, Ni salicide CMOS, and 1.5-nm direct-tunneling gate oxide CMOS. Since April of 2002, she has been associated with SoC Research and Development Center, Toshiba Corporation, Yokohama, Japan, where she is currently working on the research and development of CMOS analog devices. Her current research interests include RF characteristics and the related issues of small-geometry MOSFETs. She has authored or co-authored more than 100 papers in technical journals and for conferences.
Ms. Momose is a member of the Electrochemical Society and the Japan Society of Applied Physics. Since 2000, she has served as an Editor of IEEE EDS Newsletter. She has also served as a Technical Program Committee Member for IRPS (1992–1994), IEDM (1997, 1998), and ECS Symposium (1999–2002).
Hisayo Sasaki Momose (M'94–SM'00) was born in Gifu, Japan. She received the M.S. degree in chemistry from Ochanomizu Women's University, Tokyo, Japan, in 1984.
In 1984, she joined the Semiconductor Device Engineering Laboratory, Toshiba Corporation, Kawasaki, Japan, where she engaged in the development of static RAM and CMOS/Bi-CMOS logic LSIs and the research of hot-carrier reliability of CMOS and BiCMOS devices. In 1989, she joined the ULSI Research Center, Toshiba Corporation, where she engaged in the development of logic and analog CMOS devices and researched nitrided oxide gate CMOS, Ni salicide CMOS, and 1.5-nm direct-tunneling gate oxide CMOS. Since April of 2002, she has been associated with SoC Research and Development Center, Toshiba Corporation, Yokohama, Japan, where she is currently working on the research and development of CMOS analog devices. Her current research interests include RF characteristics and the related issues of small-geometry MOSFETs. She has authored or co-authored more than 100 papers in technical journals and for conferences.
Ms. Momose is a member of the Electrochemical Society and the Japan Society of Applied Physics. Since 2000, she has served as an Editor of IEEE EDS Newsletter. She has also served as a Technical Program Committee Member for IRPS (1992–1994), IEDM (1997, 1998), and ECS Symposium (1999–2002).View more
Author image of T. Ohguro
Toshiba Corporation, Yokohama, Japan
Tatsuya Ohguro was born in Aichi, Japan, on August 23, 1963. He received the B.S. and M.S. degrees in physics from Hokkaido University, Sapporo, Japan, in 1987 and 1989, respectively.
In 1989, he joined Toshiba Corporation, where he has been engaged in the research and development of advanced CMOS analog and logic devices at the Microelectronics Engineering Laboratory, Toshiba Corporation, Kawasaki, Japan. Since April 2002, he has been associated with the SoC Research and Development Center, Toshiba Corporation, Yokohama, Japan, where he is currently working on the research and development of CMOS analog devices.
Mr. Ohguro is a member of the Japan Society of Applied Physics. He won the Nikkei BP Grand Prize (1994).
Tatsuya Ohguro was born in Aichi, Japan, on August 23, 1963. He received the B.S. and M.S. degrees in physics from Hokkaido University, Sapporo, Japan, in 1987 and 1989, respectively.
In 1989, he joined Toshiba Corporation, where he has been engaged in the research and development of advanced CMOS analog and logic devices at the Microelectronics Engineering Laboratory, Toshiba Corporation, Kawasaki, Japan. Since April 2002, he has been associated with the SoC Research and Development Center, Toshiba Corporation, Yokohama, Japan, where he is currently working on the research and development of CMOS analog devices.
Mr. Ohguro is a member of the Japan Society of Applied Physics. He won the Nikkei BP Grand Prize (1994).View more
Author image of S.-I. Nakamura
Toshiba Corporation, Yokohama, Japan
Shin-ichi Nakamura was born in Tottori, Japan, on November 18, 1951.
In 1970, he joined the Research and Development Center, Toshiba Corporation, Kanagawa, Japan, where he has been working on the development of advanced materials of nuclear power. Since 1986, he has been engaged in the characterization of advanced materials and ULSI devices by transmission electron microscope.
Mr. Nakamura is a member of the Japan Institute of Metal and the Japan Society of Electron Microscopy. He won the OHM Technology Award in 2000.
Shin-ichi Nakamura was born in Tottori, Japan, on November 18, 1951.
In 1970, he joined the Research and Development Center, Toshiba Corporation, Kanagawa, Japan, where he has been working on the development of advanced materials of nuclear power. Since 1986, he has been engaged in the characterization of advanced materials and ULSI devices by transmission electron microscope.
Mr. Nakamura is a member of the Japan Institute of Metal and the Japan Society of Electron Microscopy. He won the OHM Technology Award in 2000.View more
Author image of Y. Toyoshima
Toshiba Corporation, Yokohama, Japan
Yoshiaki Toyoshima (M'91) received the B.S. degree in electrical engineering from Waseda University, Tokyo Japan, in 1981.
In 1984, he joined Semiconductor Device Engineering Laboratory, Toshiba Corporation, Kawasaki, Japan. He has been engaged in CMOS device design and process integration. He is currently working on development of advanced CMOS in the SoC Research and Development Center, Toshiba Corporation Semiconductor Company, Yokohama, Japan.
Yoshiaki Toyoshima (M'91) received the B.S. degree in electrical engineering from Waseda University, Tokyo Japan, in 1981.
In 1984, he joined Semiconductor Device Engineering Laboratory, Toshiba Corporation, Kawasaki, Japan. He has been engaged in CMOS device design and process integration. He is currently working on development of advanced CMOS in the SoC Research and Development Center, Toshiba Corporation Semiconductor Company, Yokohama, Japan.View more
Author image of H. Ishiuchi
Toshiba Corporation, Yokohama, Japan
Hidemi Ishiuchi (M'86) received the B.S. and M.S. degrees in physics from the University of Tokyo, Tokyo, Japan, in 1978 and 1980, respectively.
He joined Toshiba Corporation, Yokohama, Japan, in 1980, where he was working on DRAM development. From 1988 to 1989, he has been at Stanford University, Stanford, CA, as a Visiting Scholar studying BiCMOS technologies. From 1993 to 1995, he was a member of the 256 Mb DRAM Joint Development Project among IBM, Siemens, and Toshiba at IBM, East Fishkill. He is currently working on development of advanced CMOS.
Hidemi Ishiuchi (M'86) received the B.S. and M.S. degrees in physics from the University of Tokyo, Tokyo, Japan, in 1978 and 1980, respectively.
He joined Toshiba Corporation, Yokohama, Japan, in 1980, where he was working on DRAM development. From 1988 to 1989, he has been at Stanford University, Stanford, CA, as a Visiting Scholar studying BiCMOS technologies. From 1993 to 1995, he was a member of the 256 Mb DRAM Joint Development Project among IBM, Siemens, and Toshiba at IBM, East Fishkill. He is currently working on development of advanced CMOS.View more
Author image of H. Iwai
Tokyo Institute of Technology, Yokohama, Japan
Hiroshi Iwai (A'79–SM'93–F'97) was born in Tokyo, Japan, on April 25, 1949. He received the B.E. and Ph.D. degrees in electrical engineering from the University of Tokyo, Japan, in 1972 and 1992, respectively.
In 1973, he joined the Research and Development Center, Toshiba Corporation, Kawasaki, Japan, where he developed the first generation of Toshiba's NMOS LSI technology. From 1978 to 1980, he was also associated with NEC-Toshiba Information Systems, Inc., Kawasaki, Japan. From 1979 to 1989, he was with the Semiconductor Device Engineering Laboratory in the Semiconductor Group, Toshiba. In 1983 and 1984, he worked with Prof. R. W. Dutton at the Integrated Circuit Laboratory, Stanford University, Stanford, CA, as a Visiting Scholar, where he studied small-geometry effects of MOSFET capacitances. From 1989 to 1996, he was associated with the ULSI Research Laboratories in the Research and Development Center, Toshiba. From 1997 to March 1999, he was Chief Specialist of the Microelectronics Engineering Laboratories, Toshiba. Since April 1999, he has been a Professor with the Department of Advanced Applied Electronics, Interdisciplinary Graduate School of Science and Technology, Tokyo Institute of Technology, Yokohama, Japan. Since April 2001, he has also been a Member of the Frontier Collaborative Research Center, Tokyo Institute of Technology. Since joining Toshiba, he has developed several generations of high-density static RAMs, dynamic RAMs, and logic LSIs, including CMOS, bipolar, and Bi-CMOS devices. He has also been engaged in research on device physics, process technologies, and T-CAD related to small-geometry MOSFETs and high-speed bipolar transistors. His research area covers a wide range: isolation scaling analysis, deep ion-implanted channel doping techniques, on-chip capacitance measurement techniques, two-dimensional process and device simulation, small geometry MOSFET capacitance analysis, rapid thermal process, silicides techniques, interconnects techniques, nitrided oxide gate insulator techniques, p+polysilicon gate MOSFETs, polysilicon emitter techniques, BiCMOS process, hot carrier effects on small geometry MOS and bipolar transistors, bias temperature tests of MOSFETs, charge pumping measurement techniques, mechanical stress analysis of trench isolation, Ti-, Ni, Co-silicide techniques, 40-nm gate length MOSFETs and 1.5-nm-thick direct tunneling gate oxide MOSFETs, RF CMOS technologies, and so on. He has authored and coauthored more than 200 papers. He has served on many committees of conferences and as editor of many journals. His current research interests are downsizing of CMOS, high K gate insulator, ultrashallow junction, and RF silicon technologies for mobile telecommunication.
Dr. Iwai is an elected member of the IEEE EDS AdCom, an Editor of IEEE EDS Newsletter, a Guest Editor of IEEE TRANSACTIONS ON ELECTRON DEVICES, and an Editor of the Proceedings of ECS Symposium on ULSI Process Integration. He has been the Vice President of the IEEE EDS. His awards include Local Commendation for Invention from Japan Institute of Invention and Innovation (1990), Grand Prize of Nikkei BP Technology Awards (1994), IEEE EDS Paul Rappaport Award (1994), the IEICE ES Electronics Award (1998), and the IEEE EDS J. J. Ebers Award (2001). He is a member of the Electrochemical Society, the Japan Society of Applied Physics, the Institute of Electronics, Information, and Communication Engineers of Japan (IEICE), and the Institute of Electrical Engineers of Japan.
Hiroshi Iwai (A'79–SM'93–F'97) was born in Tokyo, Japan, on April 25, 1949. He received the B.E. and Ph.D. degrees in electrical engineering from the University of Tokyo, Japan, in 1972 and 1992, respectively.
In 1973, he joined the Research and Development Center, Toshiba Corporation, Kawasaki, Japan, where he developed the first generation of Toshiba's NMOS LSI technology. From 1978 to 1980, he was also associated with NEC-Toshiba Information Systems, Inc., Kawasaki, Japan. From 1979 to 1989, he was with the Semiconductor Device Engineering Laboratory in the Semiconductor Group, Toshiba. In 1983 and 1984, he worked with Prof. R. W. Dutton at the Integrated Circuit Laboratory, Stanford University, Stanford, CA, as a Visiting Scholar, where he studied small-geometry effects of MOSFET capacitances. From 1989 to 1996, he was associated with the ULSI Research Laboratories in the Research and Development Center, Toshiba. From 1997 to March 1999, he was Chief Specialist of the Microelectronics Engineering Laboratories, Toshiba. Since April 1999, he has been a Professor with the Department of Advanced Applied Electronics, Interdisciplinary Graduate School of Science and Technology, Tokyo Institute of Technology, Yokohama, Japan. Since April 2001, he has also been a Member of the Frontier Collaborative Research Center, Tokyo Institute of Technology. Since joining Toshiba, he has developed several generations of high-density static RAMs, dynamic RAMs, and logic LSIs, including CMOS, bipolar, and Bi-CMOS devices. He has also been engaged in research on device physics, process technologies, and T-CAD related to small-geometry MOSFETs and high-speed bipolar transistors. His research area covers a wide range: isolation scaling analysis, deep ion-implanted channel doping techniques, on-chip capacitance measurement techniques, two-dimensional process and device simulation, small geometry MOSFET capacitance analysis, rapid thermal process, silicides techniques, interconnects techniques, nitrided oxide gate insulator techniques, p+polysilicon gate MOSFETs, polysilicon emitter techniques, BiCMOS process, hot carrier effects on small geometry MOS and bipolar transistors, bias temperature tests of MOSFETs, charge pumping measurement techniques, mechanical stress analysis of trench isolation, Ti-, Ni, Co-silicide techniques, 40-nm gate length MOSFETs and 1.5-nm-thick direct tunneling gate oxide MOSFETs, RF CMOS technologies, and so on. He has authored and coauthored more than 200 papers. He has served on many committees of conferences and as editor of many journals. His current research interests are downsizing of CMOS, high K gate insulator, ultrashallow junction, and RF silicon technologies for mobile telecommunication.
Dr. Iwai is an elected member of the IEEE EDS AdCom, an Editor of IEEE EDS Newsletter, a Guest Editor of IEEE TRANSACTIONS ON ELECTRON DEVICES, and an Editor of the Proceedings of ECS Symposium on ULSI Process Integration. He has been the Vice President of the IEEE EDS. His awards include Local Commendation for Invention from Japan Institute of Invention and Innovation (1990), Grand Prize of Nikkei BP Technology Awards (1994), IEEE EDS Paul Rappaport Award (1994), the IEICE ES Electronics Award (1998), and the IEEE EDS J. J. Ebers Award (2001). He is a member of the Electrochemical Society, the Japan Society of Applied Physics, the Institute of Electronics, Information, and Communication Engineers of Japan (IEICE), and the Institute of Electrical Engineers of Japan.View more
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