I. Introduction
Phased arrays have demonstrated great potential in 5G, satellite communication, radar, and sensor applications [1], [2], [3], [4], [5], [6], [7], [8], [9], [10]. Since silicon processes have high integration and low cost in mass production, they are widely adopted in phased-array design. The silicon-based phased array can integrate multiple channels in a single chip, reducing complex and lossy interconnections between front-end modules on a printed circuit board (PCB), thus benefitting the beamforming performance.