I. Introduction
Pressure sensors are among the earlier devices achieved through silicon micromachining technologies that have become successful commercial products. These devices have been widely used for various industrial and biomedical applications [1]. A high number of different pressure sensors based on multiple measurement principles are already available on the market [2]. There are many pressure sensors that are able to measure pressure, but only some of them can measure tactile pressure conveniently with stable results. Also, due to the materials they use and the way they are designed, sensors are fragile, and only a few types of tactile sensors made with flexible materials have been reported [3]. These sensors can be based on piezoelectric, piezoresistive, capacitive, and resonant sensing mechanisms; and the pressure sensors currently on the market, capacitive and piezoresistive products are the most common [4]–[6].