I. Introduction
In typical phased-array systems, large numbers of T/R modules still dominate the total cost. There is a technical trend to design low-cost phased-arrays using silicon technologies for mobile satellite communication and radar systems [1]–[4]. Although the power delivering and noise performance of silicon-based chips can’t outperform III-V semiconductors such as GaAs or InP, silicon-based phased-array chips benefit from much larger integration density and lower cost. SiGe BiCMOS technology is becoming especially popular as a compromise due to its both good RF performance and low cost.