I. Introduction
As the internet of things (IoT) and machine learning gain intensive interest during the wave of fourth-industrial-revolution processors, the demand for the next-generation nonvolatile memory with short access times also increases [1]. Several key advantages of the phase-change memory (PCM), such as dynamic random access memory (DRAM)-comparable latency and higher endurance and scalability than those of flash memory, have led to active research in this area [2]. Specifically, by replacing the traditional transistor with a compact ovonic threshold switch (OTS) device [3]–[8] for the selector, the area efficiency and scalability can be greatly enhanced. As an example, the 3-D cross-point structure with OTS shown in Fig. 1 shows a high cell density due to the cell size (where is the feature size) [3]–[6] and the multi-layer structure used, with peripheral circuits located below the memory array.
Perspective view of the cross-point memory structure.