A modified thermoelastic damping model for micro- and nanobeam resonators with non-fourier theory of dual-phase-lag model

Thermoelastic damping (TED) determines the upper limitation of quality factors of micro- and nanobeam resonators. Accurate determination of thermoelastic damping (TED) is momentous and significant for the design of micro- and nanobeam resonators under the non-Fourier effect. Guo et al have developed an analytical TED model for rectangular cross-section micro- and nanobeam resonators with non-Fourier theory of dual-phase-lag model. However, there exist some errors in their model. In this work, basing on the non-Fourier theory of dual-phase-lag model, a modified TED model for the micro- and nanobeam resonators with rectangular cross-section is derived for the first time. Results show that the TED behaviors depend on the ratio of dual-phase-lag constants significantly and are independent of the beam aspect ratio.

I. Introduction

Micro- and nanobeam resonators have been applied in many fields, such as resonant accelerometers, frequency filters, and inertial sensors. Quality factor (- factor) is regarded as a crucial evaluation parameter of the performance for micro- and nanobeam resonators [1]–[2]. Thermoelastic damping (TED) determines the upper limitation of -factor for the vacuum-operated resonator. It has been confirmed that TED is a significant and intrinsic mechanism of energy dissipation for the thermoelastic solid. It is crucial to predict accurately the TED in the design and optimization of micro- and nanobeam resonators.