Hongyue Zhou - IEEE Xplore Author Profile

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The non-uniform micro/nano-beams have been found widely applications in resonators because of their special structural properties. Thermoelastic damping (TED) is confirmed as a fundamental and momentous energy dissipation mechanism of operated-vacuum resonators. TED-limited quality factor (Q-factor) in uniform micro/nano-beam resonators has been investigated sufficiently. In contrast, TED in non-u...Show More
Thermoelastic damping (TED) is a fundamental and dominant energy-dissipation mechanism of micro/nano-resonators operated in vacuum. The quality factor of resonators is limited by TED. Two models, which were proposed by Lifshits and Roukes and Zener, are popularly used to calculate TED values. However, these two models are only suitable for resonators with uniform cross-section, and unsuitable for ...Show More
For microbeam resonators operated in vacuum, thermoelastic damping (TED) has been theoretically and experimentally verified as a fundamental mechanism of energy loss. Especially, the upper limitation of quality factor of resonators is determined by thermoelastic damping. There are two classical models developed by Zener and Lifshits and Roukes (LR) for evaluating TED. However, the classical models...Show More
Non-uniform microelectromechanical systems (MEMS) beam resonators, such as stepped-beam microresonator, tapered-beam microresonator and torsion-beam microresonator, have been considered for real applications. Thermoelastic damping (TED) has been confirmed as a significantly intrinsic mechanism of energy dissipation for microbeam resonators operated in the vacuum environment. TED determines the upp...Show More
Thermoelastic damping (TED) determines the upper limitation of quality factors of micro- and nanobeam resonators. Accurate determination of thermoelastic damping (TED) is momentous and significant for the design of micro- and nanobeam resonators under the non-Fourier effect. Guo et al have developed an analytical TED model for rectangular cross-section micro- and nanobeam resonators with non-Fouri...Show More
Predicting thermoelastic damping (TED) under the effect of non-Fourier heat conduction is challenging and crucial for the design of micro- and nanobeam resonators with high quality factors. In the past, many works were devoted to the modeling of TED under the effect of non-Fourier heat conduction. Some analytical and numerical results for TED were presented. However, the spectrum of TED contains m...Show More
With the development of advanced manufacturing technologies of Micro-electro-mechanical Systems (MEMS), microbeams with variable cross-section have broad application in a wide range of resonators, such as stepped beam and tapered beam. As a fundamental and important energy dissipation mechanism in micro-resonators, thermoelastic damping (TED) is generally predicted by the classical Zener's model a...Show More