Abstract:
In developing position sensitive radiation sensors, e.g. for medical imaging, low-gain silicon well sensors were made for the detection of scintillation light. The 3/spl ...Show MoreMetadata
Abstract:
In developing position sensitive radiation sensors, e.g. for medical imaging, low-gain silicon well sensors were made for the detection of scintillation light. The 3/spl times/3 arrays include N/sup ++/NP diodes, processed in the /spl sim/12 /spl mu/m thick membranes that remain after thinning of 530 /spl mu/m thick [100] silicon wafers by means of a potassium hydroxide (KOH) solution. A comparison is made for the light detection efficiency of these diodes with that of a 500 /spl mu/m thick PIN photodiode.
Date of Conference: 08-14 November 1998
Date Added to IEEE Xplore: 06 August 2002
Print ISBN:0-7803-5021-9
Print ISSN: 1082-3654
References is not available for this document.
Select All
1.
P. Nelvig, K. Wing and U. Welander, "Sens-a-ray. A new system for direct digital intraoral radiography", Oral Surg. Oral Med. Oral Path., vol. 74, no. 6, pp. 818-823, 1992.
2.
R. Pani and R. Pellegrini, "Scintillating array gamma camera for clinical use", Nucl. Instr. and Meth., vol. A 392, pp. 295-298, 1997.
3.
J. C van't Spijker and P. Dorenbos, "Lu2S3:Ce3+ A new red luminescing scintillator", Nucl. Instr. and Meth., vol. B 134, pp. 304-309, 1998.
4.
G. A. Antcliffe and L. J. Hornbeck, "A Backside illuminated 400x400 Charge-Couple Device Imager", IEEE Trans. Electron. Dev., vol. ED 23, pp. 1225-1232, 1976.
5.
L. Evensen and T. Westgaard, "Thin Detectors for the CHICSi DE-E Telescope", IEEE Trans. Nucl. Sci., vol. NS-44, pp. 629-634, 1997.
6.
T.A Kwa, P. M. Sarro and R. F. Wolfwenbuttel, "Backside-illuminated silicon photodiode array for an integrated spectrometer", IEEE Trans. Electr. Dev., vol. 44, no. 5, pp. 761-765, 1997.
7.
B. Schmidt, J. von Borany and D. Shubert, "Application of wet chemical selective etch techniques to the fabrication of thin silicon detectors", Nucl. Instr. and Meth., vol. A 326, pp. 21-26, 1993.
8.
C. Carriet and R. Lecomte, "Recent Results in Scintillation Detection with Silicon Avalanche Photodiodes", IEEE Trans. Nucl. Sci., vol. NS-37, pp. 209-214, 1990.
9.
E. V. Sysoeva and V. A. Tarasov, "The study of α/γ ratio for inorganic scintillation detectors", Nucl. Instr. and Meth., vol. A 414, pp. 274-278, 1998.
