De-embedding and modeling of spiral inductor based on substrate integrated suspended line technology

This paper proposes a spiral inductor based on substrate integrated suspended line (SISL) technology. Short-open de-embedding method is used for the parameter extraction, a physical model is established for SISL inductor. The measurement and simulation results confirm that the equivalent-circuit can accurately characterizes the behavior of the spiral inductor.

I. Introduction

Inductor is undoubtedly one of the most important element in microwave and mm-wave integrated circuits such as low noise amplifiers, VCOs [1]. Various inductor models have been developed to characterize the inductor behaviors in a wide frequency band, such as -models, double--models and T-model [2].