Capacitor Test Structures for C-V Measurements on CMOS Devices with Sub-20 Å Oxides

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First Page of the Article

Published in: 30th European Solid-State Device Research Conference

Date of Conference: 11-13 September 2000

Date Added to IEEE Xplore: 17 October 2005

Print ISBN:2-86332-248-6

DOI: 10.1109/ESSDERC.2000.194776

Conference Location: Cork, Ireland

First Page of the Article

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