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A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

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Abstract:

A self-aligned vertical comb-drive actuator fabricated using surface micromachining is presented. One- and two-axis tilt scanning micromirrors with the actuators were fab...Show More

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Abstract:

A self-aligned vertical comb-drive actuator fabricated using surface micromachining is presented. One- and two-axis tilt scanning micromirrors with the actuators were fabricated and tested. A mechanical tilt angle of /spl plusmn/1.4/spl deg/ at 66 V/sub DC/ was achieved for a 1-mm-diameter micromirror.

Published in: 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682)

Date of Conference: 18-21 August 2003

Date Added to IEEE Xplore: 29 September 2003

Print ISBN:0-7803-7830-X

DOI: 10.1109/OMEMS.2003.1233511

Conference Location: Waikoloa, HI, USA

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Summary

A self-aligned vertical comb-drive actuator fabricated using surface micromachining is presented. One- and two-axis tilt scanning micromirrors with the actuators were fabricated and tested. A mechanical tilt angle of ±1.4° at 66 V_DC was achieved for a l-mm-diameter micromirror.

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A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

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A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

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