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Jin-Hong Park - IEEE Xplore Author Profile

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We report WSe2 homojunction-based field-effect transistors (FETs) with W-shaped transfer IV characteristics, enabled by area-selective tailoring of the WSe2 channel work function with the electron-beam treatment. We demonstrate that FETs with such IV curves are suitable for the implementation of the two-input ternary NAND logic gate, one of the essential building blocks required for the realizatio...Show More
The color filter required for manufacturing a CMOS image sensor was redeveloped to optimize its optical uniformity. An in-depth study of the three-dimensional (3D) coating process and how it gives rise to various radial-shaped striation patterns was conducted. These radial-shaped striation patterns were systematically investigated with reference to two types of patterns: the orthogonal type found ...Show More
A highly integrated, high-voltage dual-mode boost converter is presented for solid-state drives applications in portable devices, where standby mode efficiency with 100-mA load. To enhance efficiency in light load conditions and to achieve a wide operation load range, loss minimization by balancing conduction and switching losses is ado...Show More
Recently, transition-metal dichalcogenides (TMDs), such as molybdenum disulfide (MoS2)and tungsten diselenide (WSe2), have been studied for photovoltaic devices due to their superior optical properties[1] However, power conversion efficiency (PCE)of the devices, which were fabricated on the monolayer TMDs with direct bandgap property, has been limited because of mechanical limitation for absorbing...Show More
In this study, N-type amorphous indium zinc oxide thin-film transistors are fabricated and temperature-dependent electrical characteristics in the range of 170-295 K are analyzed through experimental measurements and using an equivalent-circuit model. In this model, thermionic field emission for reverse bias and a thermionic emission mechanism for forward bias are applied. The barrier height coeff...Show More
In this letter, we demonstrate an efficient threshold voltage (Vth) adjustment technique by depositing single or double dielectric layers on MoS2 field-effect transistors (FETs). We used Al2O3 and SiO2 as the capping layers on the MoS2 FET and observed different average Vth shifts of -2.39 and +7.13 V, respectively. In order to further the controllability of the dielectric capping effect, the depo...Show More
The effect of post-deposition H2 annealing (PDHA) on the reduction of a contact resistance by the metal-interlayer-semiconductor (M-I-S) source/drain (S/D) structure of the germanium (Ge) n-channel field-effect transistor (FET) is demonstrated in this letter. The M-I-S structure reduces the contact resistance of the metal/n-type Ge (n-Ge) contact by alleviating the Fermi-level pinning (FLP). In ad...Show More
We demonstrate the effect of SF6 plasma passivation with a ZnO interlayer in a metal-interlayer-semiconductor (MIS) structure to reduce source/drain (S/D) contact resistance. The interface trap states and the metal-induced gap states causing the Fermi-level pinning problem are effectively alleviated by passivating the GaAs surface with SF6 plasma treatment and inserting a thin ZnO interlayer, resp...Show More
Here, we theoretically and experimentally investigate the impact of a high-κ layer inserted between graphene and p-Si in a graphene/Si junction. We have achieved 86-fold and 222-fold reductions in a specific contact resistivity (ρc) by inserting 1-nm-thick Al2O3 and 2-nm-thick TiO2 in the graphene-semiconductor junction, respectively, corresponding to lowering the effective barrier height by 0.24 ...Show More
We demonstrate the use of germanium passivation in conjunction with a ZnO interlayer in a metal-interlayer- semiconductor structure in a source/drain (S/D) contact. The Fermi-level pinning problem resulting in the large contact resistances in S/D contacts is effectively alleviated by inserting a thin Ge passivation layer and a ZnO interlayer, passivating the GaAs surface and reducing the metal-ind...Show More
We demonstrate Fermi-level unpinning and contact resistance reduction by surface passivation using SF6 plasma treatment of a metal/germanium (Ge) contact. A specific contact resistivity (Pc) of 1.14 × 10-3 Ω · cm2 and 0.31 eV of Schottky barrier height is achieved for a Ti/SF6-treated n-type Ge (n-Ge) (Nd = 1 × 1017 cm-3) contact, exhibiting 1700 times Pc reduction from a Ti/nontreated n-Ge contac...Show More
We report that control over the grain size and lateral growth of monolayer MoS2 film, yielding a uniform large-area monolayer MoS2 film, can be achieved by submitting the SiO2 surfaces of the substrates to oxygen plasma treatment and modulating substrate temperature in chemical vapor deposition (CVD) process. Scanning electron microscopy and atomic force microscopy images and Raman spectra reveale...Show More
We investigate the impact of metal-interfacial layer-semiconductor source/drain (M-I-S S/D) structure with heavily doped n-type interfacial layer (n+-IL) or with undoped IL on sub-10-nm n-type germanium (Ge) FinFET device performance using 3-D TCAD simulations. Compared to the metal- semiconductor S/D structure, the M-I-S S/D structures provide much lower contact resistivity. Especially, the M-I-S...Show More
We demonstrate contact resistivity reduction by inserting an Ar plasma-treated TiO2-x heavily doped interfacial layer to metal/semiconductor contact to overcome a Fermi-level pinning problem on germanium (Ge). A specific contact resistivity of 3.16 × 10-3Ω · cm2 on moderately doped n-type Ge substrate (6 × 1016cm-3) was achieved, exhibiting ×584 reduction from Ti/Ge structure, and ×11 reduction fr...Show More
In this letter, we investigate the impact of the thermal recovery (annealing) process on the electrical characteristics and the stability of IGZO TFTs in terms of: 1) vertical/lateral diffusion of Ti atoms into the IGZO channel region from the source/drain electrode and 2) recovery or local rearrangement of ions in IGZO. Although low thermal recovery temperatures <;300 °C are required to avoid the...Show More
We present a new model to demonstrate the effect of heavily doped interfacial layer (IL) insertion on contact resistivity reduction in metal-germanium (Ge) structure. It is found that the doping of IL results in lowering Schottky barrier of Ge significantly, and based on this lowering effect, a metal-IL-semiconductor model is newly proposed. From this model, the abrupt reduction of contact resisti...Show More
A CMOS compatible technique for fabricating germanium (Ge) on insulator (GOI) structure that is locally implemented on silicon (Si) substrate is demonstrated. On a (100) crystalline Si substrate, silicon dioxide (SiO2) is thermally grown. Then growth window for Ge is defined by locally etching down the SiO2 to reveal the Si surface. Ge is grown epitaxially with multiple steps of high temperature h...Show More
In this letter, we propose a hydrazine (N2H4)-based nitridation process, which reduces the native oxide (GeOx) component and finally transforms it into GeOxNy on intrinsic Ge, to relieve the EF pinning problem. The decomposition of GeOx and formation of GeOxNy by N2H4 are systematically investigated through cross-sectional transmission electron microscopy, X-ray photoelectron spectroscopy, and ato...Show More
In this letter, we investigate the electrical behavior of vacancy $V_{\rm Ge}$ defects in Ge at various thermal annealing conditions through electrochemical capacitance–voltage analysis. Then, the effects of the annealing process on Ge $\hbox{n}^{+}/\hbox{p}$ junction diodes were also studied with $J{-}V$, transmission electron microscopy, and secondary ion mass spectroscopy measurements in the ...Show More
In this letter, we have analyzed the area, perimeter, and corner leakage current components of lateral p+/n-Ge-based diodes with a GeO2 isolation layer, which were fabricated at temperatures below 500 °C. In addition, the effects of forming gas anneal are included, which was done to further reduce the leakage current. It was found that corner leakage was the most dominant source of surface leakage...Show More
In this letter, we demonstrate an n-indium-gallium-zinc-oxide (IGZO)/i-germanium (Ge) heterojunction diode with an ultrashallow junction depth of ~ 37 nm. X-ray diffraction, atomic force microscopy, and secondary ion mass spectrometry analyses are performed to precisely investigate the n-IGZO and n-IGZO/i-Ge junctions. When the junction diodes are annealed at between 400 °C and 600 °C, a very high...Show More
Selective-area germanium (Ge) layer on silicon (Si) is desired to realize the advanced Ge devices integrated with Si very-large-scale-integration (VLSI) components. We demonstrate the area-dependent high-quality Ge growth on Si substrate through SiO2 windows. The combination of area-dependent growth and multistep deposition/hydrogen annealing cycles has effectively reduced the surface roughness an...Show More
In this paper, we optimize and investigate Ge n+/p and p+/n junction diodes formed by Co metal-induced dopant activation technique at the activation temperature range between 300 °C and 420 °C in terms of on/ off-current ratio. Combining this low-temperature n+/p and p+/n junction formation technique with a low-temperature gate stack comprised of Al/Al2O3/GeO2 by ozone oxidation technique, we demo...Show More
In this paper, the acceptor and donor nature of interface traps are investigated using conductance and interface trap time constant measurements on Ge n- and p-type metal-oxide-semiconductor field-effect transistors (N-and PMOSFETs). The presence of acceptor-type interface trap states in the valence-band side of Ge band gap is confirmed by these measurements. Electron trapping by the acceptor-type...Show More
We demonstrate novel Ge n-MOSFETs with raised source/drain (S/D) fabricated on high-quality single-crystal Ge selectively grown heteroepitaxially on Si. For the raised S/D, an implant-free in situ doping technique has been employed for low-resistance, abrupt, and shallow $\hbox{n}^{+}/\hbox{p}$ junctions. The novel n-MOSFETs show an excellent on/off ratio $(\hbox{4} \times \hbox{10}^{3})$ with ver...Show More