I Introduction
SiC MOSFETs are widely used in power electronic converters with the advantages of high switching speed, high power density, high juncture temperature, low resistance, high blocking voltage, etc [1]–[3]. The complex and harsh working conditions are demand for a higher reliability power system, while the power semiconductor failure accounts for the highest proportion in all failure cases, so health monitoring of power semiconductors is of great significance. It is very important to obtain the junction temperature of the device without affecting its normal function during the operation of the converter.