I. Introduction
Numerous studies of gas breakdown under radio frequency (RF) conditions have been reported in the literature [1], [2], [3], [4], [5], [6]. Applications of such breakdown include etching [7], [8], thin-film deposition [9], pollution control [10], biomedical engineering [11], pumping of gas lasers [12], etc. The use of atmospheric pressure plasmas has greatly expanded the scope and utility of plasma jets [13] and the cold plasma torch [14]. In this regard, a recent report on RF breakdown in air at atmospheric pressure for relatively larger gaps had been shown to match experimental data fairly well [15]. The present contribution expands on that previous report, with explicit inclusion of photoemission and photoionization. Results are compared with experiments that were performed on relatively large electrodes, a configuration that helps support and enhance the contribution of photoemission by providing an extended area for photon gathering.