I. Introduction
Integrated voltage controlled capacitances (varactors) are widely used as frequency tuning elements in integrated LCtank voltage controlled oscillators (VCOs) for Radio-Frequency circuits. Together with an integrated inductor, the varactor builds the core of these VCOs. As the inductance is constant, the varactor needs to provide a large capacitance tuning range to allow for a large frequency tuning range of the VCO. Moreover, high quality factors of the inductor and the varactor are necessary to achieve low phase noise of the VCO.