Low-loss, compact, and polarization independent PHASAR demultiplexer fabricated by using a double-etch process

A compact low-loss polarization independent 8 /spl times/ 8 PHASAR demultiplexer is presented. Device size is 0.93 /spl times/ 0.75 mm/sup 2/. On-chip losses are less than 4 dB and crosstalk is better than -20 dB. The device is suitable for integration with electro-optical switches for application in integrated optical crossconnects, add-drop multiplexers and multiwavelength lasers.

I. Introduction

Phased-Array demultiplexers [1] are important components in multiwavelength lasers (MWLs) [2], [3] and integrated wavelength-selective switches such as add–drop multiplexers (ADMs) [4] and optical crossconnects (OXCs) [5], [6]. The increasing amount of components integrated on a single chip results in severe demands on wafer uniformity and processing. These demands can be relaxed by using compact components.