I. Introduction
Microprocessors have undergone a significant evolution in complexity and capability from their introduction in the early 1970s to the present day. The exponential increase in microprocessor performance and affordability can be attributed to the semiconductor industry’s adherence to Moore’s law which posits that the transistor count in a chip will double every two years [1]. Robert Dennard proposed a set of MOSFET scaling guidelines [2] that would enable transistors to achieve improved performance while reducing area and power. The traditional scaling approach as described by Dennard was very effective until the early 2000s in keeping the power density constant even as the transistors got progressively smaller each generation. However, as the gate oxide thickness scaled down to a handful of atomic layers, subthreshold leakage due to electron tunneling through the oxide has become an appreciable fraction of the overall dynamic current. As a result, process engineers had to resort to alternate methods through innovations in materials and transistor structure [3] to achieve the necessary area scaling to keep pace with Moore’s law. This can be inferred from Fig. 1 which plots the scaling trends for some key microprocessor metrics for the past fifty years [4]. While the nontraditional scaling methods have been mostly successful in scaling the transistor area while improving performance, they were not as effective in reducing power.
Scaling trends for some key microprocessor metrics.