I. Introduction
Precision measurement of surface topography is important for machining and process control in high-end manufacturing [1]. Despite the rapid development of different measuring techniques and algorithms, multiscale precision measurements of complex surfaces still facing challenging problems [2]. Ultra-accurate probe contact measurements, such as coordinate measurement machines (CMM), are necessary to achieve highly accurate and robust measurements. CMM can provide accurate shape results for a complex surface but has difficulty obtaining dense details [3]. The cost and environmental requirements of CMM, especially the sampling efficiency and sparsity, extremely limit their application to multiscale surface metrology [4].