I. Introduction
Power electronics device is extensively utilized in aerospace [1], new energy utilization [2], electric vehicle [3], [4] and other fields, and their reliability requirements are getting higher and higher. SiC MOSFET is a commonly used wide bandgap power electronics device, which has a wide range of applications. When the aging of the device causes unpredictable failure, it may consume high maintenance costs and even cause catastrophic accidents. Therefore, the condition monitoring and fault diagnosis of SiC MOSFET module [5] can identify the health state of the device and find the cause of the fault, effectively reduce the failure rate of power electronics device, and improve the reliability of power electronics device.