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11THz GaAs Terahertz Schottky Barrier Diode with Sub 0.5 fF <span class="MathJax_Preview" style="">C_{\mathrm{j}0}</span><script type="math/tex" id="MathJax-Element-1">C_{\mathrm{j}0}</script> | IEEE Conference Publication | IEEE Xplore

11THz GaAs Terahertz Schottky Barrier Diode with Sub 0.5 fF C_{\mathrm{j}0}


Abstract:

GaAs terahertz schottky barrier diode SBD has been a major technology in terahertz wave multiplexing, mixing and direct detection for decades, due to its high mobility an...Show More

Abstract:

GaAs terahertz schottky barrier diode SBD has been a major technology in terahertz wave multiplexing, mixing and direct detection for decades, due to its high mobility and low capacity. In this paper, T-anode GaAs terahertz SBD was presented with its C_{\mathrm{j}0} scaled into sub-fF range. Scalling C-V measurement showed C_{\mathrm{j}0} without parasitic capacity reached 0.476fF for the 0.5\mu\mathrm{m} anode diameter device. With the relative low series resistance Rs of 28.8\mathrm{\Omega}, cutoff frequency f_{\mathrm{t}} reached 11.6THz. The whole process was based on 4 inch GaAs wafer, guarantee stability and conformity in terahertz GaAs SBD integrated circuits working over 1THz.
Date of Conference: 29 August 2020 - 01 September 2020
Date Added to IEEE Xplore: 30 December 2020
ISBN Information:

ISSN Information:

Conference Location: Tianjin, China

Funding Agency:


I. Introduction

A Electronic devices working in the Terahertz needs extremely high cutoff frequency ft. InP HEMT and InP HBT, representing the fastest transistors were reported with ft around 1THz. the frequency performance of transistors had hardly improved over 1THz [1]–[2], because of its complicated epitaxial material and extremely scaled process line width. GaAs Schottky diode has been evolved and applied in terahertz multiplexing, mixing and direct detection for decades, and still maintain unshakable, due to its high electron mobility, simple device structure, and small junction capacity, especially in the range from 1THz to 5THz [3]–[4].

References

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