1. Introduction
The wide bandgap semiconductor GaN based power devices are attracting worldwide attention owing to their superior performances and their potential for next-generation power switching applications [1]–[3]. A critical issue that had hindered the GaN power devices from being accepted by the market was their inherent normally-on operation mode, while normally-off operation is virtually a must-have feature for a successful power device [4]–[6]. The p-GaN gate structure has been widely investigated to realize normally-off operation in GaN devices. At present, normally-off p-GaN gate HEMTs are commercially available [7], [8]. A representative p-GaN gate HEMT features a Schottky contact between the gate metal and p-GaN layer; thereby, reduced gate leakage current and enlarged gate swing are obtained [9], [10]. A large gate voltage swing allows the GaN power devices to be driven with traditional voltage-based driving circuits, and is beneficial for the realization of GaN power ICs [11]–[13].