I. Introduction
Monolithically integrated photodetectors (PDs) with ultrafast and broadband detection are required for optical links in data centers. Their detection speed can be improved by structure miniaturization to reduce the carrier transit time. However, further down-scaling of conventional PDs is restricted by the diffraction limit. Plasmonic devices become attractive due to their ability to overcome this bottleneck, and different types of plasmonic PDs have been recently reported [1] [2]. In this work, we first study the physical mechanisms limiting the response of a previously designed non-plasmonic butt-coupled waveguide photodetector (WGPD)[3], and then explore their impacts on the optical performance when scaling the plasmonic structure. All investigations are conducted using coupled 3D opto-electrical simulations with Sentaurus Electromagnetic Wave (EMW) Solver [4] for FDTD calculation and Sentaurus Device [4] for electrical transport. The Ag/intrinsic region (i-region) interface is assumed as ideal Schottky type (barrier height 0.6 eV) without image-force lowering.