I. Introduction
When designing microactuators for battery-powered systems, it is important to balance multiple objectives including energy efficiency, actuator impedance, and actuator force-displacement characteristics. Electrothermal microactuators are attractive due to high forces and displacements that can be generated via Joule heating at relatively low voltages that match existing battery technologies. These actuators have found use in various applications such as micro-mirrors [1], micro-grippers [2], micro-motors [3], and microrobots [4]–[8]. However, in comparison to electrostatic and piezoelectric actuation, electrothermal actuators trade off energy efficiency (defined as mechanical work output divided by electrical energy input) for the benefit of low voltage actuation [9].