I. Introduction
As a type of plasma with a moderate and controllable gas temperature and as an efficient source of highly active species, microwave plasmas have achieved good results in the fields of surface modification, nanomaterial preparation, and exhaust gas treatment in recent years [1]–[5]. Compared with arc plasmas and dielectric barrier discharge plasmas, microwave plasmas have many advantages, such as 1) requiring no electrodes and 2) being easy to generate a large volume of plasma at atmospheric pressure. Therefore, microwave plasmas have wide application prospects for future use.