Design of a 3D Vision-based Micro-Force Sensing Probe

This paper presents a vision-based micro-force sensing probe that is capable of μN level force sensing in three dimensions. The sensor is mounted on a standard micromanipulation probe and can be easily integrated into many systems. Furthermore, it is cheap, reliable, and can be specifically tailored for a desired application. Tests were conducted to demonstrate the accuracy of the system. It is capable of achieving sub-μN force resolution, with a range of 175 μN and an accuracy in the x, y, and z directions of 3.63%,0.58%, and 0.61%, respectively. Two case studies using the vision-based micro-force sensing probe were performed to demonstrate the efficacy of the system.

I. Introduction

The ability to sense forces at the microscale is extremely important for the development of new technologies and to expand the capabilities of micro systems. However, sensors at this scale are usually expensive and hard to implement. There are multiple methods that have been used to reach micro-Newton level resolution, such as capacitive MEMS sensors [1], piezoelectric sensors [2], [3], strain gauges [4], Atomic Force Microscope (AFM) measurements [5], [6], among others. Some possible applications of such sensors include the field of mechanobiology [7], theranostics [8], biomanipulation [9], and the automated assembly of micro parts. Additionally, force information can be used in parallel with haptic feedback devices [10] to allow for more precise manipulation.