Optical couplers in silicon-on-insulator technology

Summary form only given. Silicon-on-insulator technology promises improved performance for CMOS integrated circuits. Due to their unique optical properties, SOI structures offer the ability to integrate long-wavelength photonic devices into the CMOS integrated circuits. A 5/spl times/9 star coupler was fabricated with rib waveguide widths of 4 /spl mu/m and rib height of 2.0 /spl mu/m. Each waveguide is composed of a straight and a curved section followed by a radial section directed toward the center of the opposite array.