Contents I. Introduction
Since the development of cloud computing, optical technology as a short distance large capacity communication such as in the data center attracts attention and the optical cable is actually put to practical use as an active optical cable (AOC). More and more, it seems that the area of optical communication within the device such as the data center is expanded [1]. For example, an optoelectronic hybrid circuit board using a multimode polymer waveguide on an LSI package has been proposed. In the future, it is necessary to fabricate with single mode (SM) waveguides for the purpose of increasing the capacity. Now, the problems in SM waveguides on the substrate are low loss and high reproducibility. To solve such problems, we fabricated and evacuated SM waveguide array on a glass epoxy substrate.
