A 1" format 1.5 M pixel IT-CCD image sensor for an HDTV camera system

A 1-in. format 1.5-million pixel IT (interline transfer) CCD (charge coupled device) image sensor has been developed for an HDTV (high-definition television) camera system. To achieve a low smear ratio while maintaining a high level of sensitivity, the authors have developed a new impurity profile of a buried P/sup +/-layer and an on chip microlens array whose material is a deep-UV resist. Using this sensor, a high-fidelity picture with a horizontal resolution of 820 TV lines has been obtained. The IT-CCD sensor has achieved a smear ratio of less than -90 dB, a sensitivity level of 80 nA/Lx, and a maximum charge handling capacity of 1.2*10/sup 5/ electrons.<>