I. Introduction
It is well-known that B and P dopants in bulk Si reduce its thermal conductivity in the low-temperature range [1], [2]. Therefore, the doping concentration could be another parameter to improve the figure of merit (ZT) of nanostructures when used as thermoelectric converters. Recent simulations [3] of the thermal conductivity of B-doped Si nanowires with a diameter of 31 nm did not match the experimental data because the effect of electron-phonon scattering was not taken into account. In this paper, electron-phonon scattering is included for the first time to calculate the thermal conductivity of B-and P-doped Si nanowires. The good agreement with the available experimental data validates the theoretical model.