I. Introduction
Pseudospark discharge has attracted considerable attention due to its potential applications in such diverse areas as high-power switching, electron beam lithography, plasma processing, free electron lasers, and high-brightness electron beam sources for advanced accelerators [1]–[6]. The pseudospark discharge under both pulsed voltages and dc voltages can generate high-brightness intense electron beams, with high electron energies, currents in a wide range, power densities up to 109 W/cm−2, and small diameters of 0.2 mm [3], [7]–[9]. The pulsed electron beam is now developing as a useful tool for surface modification of materials [10]. From the 1980s, many studies have been carried out. Schoelch [11] has prepared high-temperature superconductive film yttrium barium copper oxide with pulsed electron beams ablation. Liu et al. [12] have prepared the nanometer films with pseudospark electron beam deposition.