I. Introduction
As key components of phased-array antennas, phase shifters [1] are required to be low loss, broadband, small size, and fast. In the past years, various phase shifters were designed by adopting the switched-line configurations [2], couplers with variable loads [3], LC switching networks [4] and distributed loaded lines [5], [6] to change the phase shift. The phase shift can be electronically tuned by microelectromechanical system (MEMS) switches [2], CMOS switches [4], magnetic or ferroelectric components [6] and solid-state varactors or switches [3], [5], [7]. Diode phase shifters are widely employed because of their fast switching time, low weight, and low cost.