I. Introduction
Both the high accuracy and high sensitivity of magnetic-field sensors are critical in many fields of applications, like robotics, mechatronics, industrial controls, automation, etc. Unfortunately, many of the existing magnetometers do not match such high metrological requirements. For example, the presented in [1]–[8] magnetic-field sensors have decreased sensitivity, as only a half of the supply current is used for generating the output Hall voltage. Moreover, these devises have reduced metrological accuracy due to the both small sensitivity and the relatively high offset. The last is due to: the electrical asymmetry, caused by the geometrical imperfections in the device design; inevitable technological imprecision; mechanical and temperature, strain and stress, etc. This paper suggests a novel silicon in-plane magnetosensitive Hall microsensor, ensuring both high magnetosensitivity and increased metrological accuracy.