I. Introduction
In the past decades, micro-electro-mechanical-system (MEMS) technology has provided advantages over traditional macroscale counterparts. Especially, micropumps have been investigated extensively and various concepts of actuation were developed [1]. For instance, pneumatic micropumps fabricated by soft lithography techniques were demonstrated for liquid delivery [2]. Alternatively, electroosmotic micropumps delivering drugs by using elctrokinetic forces were presented [3]. Similarly, piezoelectric micropumps showed decent performance in drug delivery in microchannels [4]. A magnetic peristaltic micropump was demonstrated by rotating motor shafts with magnets positioned. It then actuated the permanent magnets loaded inside the chamber layer generating peristaltic motion [5]. Magnetic actuation showed its potential for biomedical applications with the characteristics of large output forces in small scale.