I. Introduction
Recently, nanopositioning has been drawing considerable attention in the modern manufacturing. Because of the properties of high stiffness and fast response, piezoelectric actuators (PEAs) have been widely used as a core component in many practical nanopositioning applications, such as the micromanipulator [1] and ultraprecision mechanism [2]. However, the undesired inherent “hysteresis nonlinearity” can greatly deteriorate the positioning performance of PEAs. Hysteresis, one of the dominant nonlinear characteristics of PEAs, is a kind of memory effect where the current displacement of PEAs is affected not only by its current control effort but also by its past displacements [3]. Furthermore, the dynamics of PEAs is also relevant to the frequency of its control input (called rate-dependent property). When the frequency of the control input changes, the dynamical behavior of PEAs has a visible variation. Because of these particular phenomena, how to control PEAs with a desired precision becomes a challenging task.