I. Introduction
Microelectromechanical systems (MEMS) components are widely utilized in many different applications, such as sensors, portable consumer electronics, radio frequency switches, and power devices in automotive, aerospace, and military electronics. The use conditions for MEMS-based microsystems can be rather harsh in some applications (especially in sensing applications), such as harsh chemicals, extreme thermal and humidity environments, shocks, and drops [1], [2]. In particular, portable electronic devices are commonly exposed to impact loading due to accidental drops, therefore the reliability of MEMS assemblies under shock and impact is critically important. Especially, the dynamic response of the moving parts in MEMS [2], [3] makes identifying the root causes of failures in MEMS assemblies a very challenging task.