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A fixed probe position self-calibration algorithm of broadband on-wafer scattering parameter measurements without impedance-standard substrate for RFIC production test applications | IEEE Conference Publication | IEEE Xplore

A fixed probe position self-calibration algorithm of broadband on-wafer scattering parameter measurements without impedance-standard substrate for RFIC production test applications


Abstract:

This paper presents an on-wafer calibration algorithm, with fixed probe position constraint, for scattering parameter (S-parameter) measurements without impedance-standar...Show More

Abstract:

This paper presents an on-wafer calibration algorithm, with fixed probe position constraint, for scattering parameter (S-parameter) measurements without impedance-standard substrate (ISS). The fixed probe position feature is suitable for production tests of radio-frequency integrated circuits (RFICs), where the probe positions designed for the dimension of the device-under-test (DUT) are applied to the associated calibration standards as well, and the probes need not to be moved in X-Y directions during calibrations and measurements. Three on-chip standards are adapted including a transmission line (TL), a series resistor with offset line segment, and a shunt resistor with offset line segment, where the characteristics of the on-chip standards are solved using the self-calibration technique. To show the robustness of the proposed calibration algorithm, simulation studies with noise effects are conducted. Further experimental results are shown with verifications of an independent multiline thru-reflect-line (TRL) calibration data.
Date of Conference: 22-27 May 2016
Date Added to IEEE Xplore: 11 August 2016
ISBN Information:
Conference Location: San Francisco, CA, USA

I. Introduction

Scattering parameter (S-parameter) calibration of a vector network analyzer is essential and important for device/circuit measurements in high frequency applications. For production tests of radio-frequency integrated circuits (RFICs), the wafer probes in fixed positions for both of calibrations and measurements are usually preferred because of no movements required for probes in X-Y directions. In addition, the re-calibrations actually are performed often in production tests since the calibration accuracies will be degraded after certain probing times. The fixed probe design can further save the testing times and reduce the uncertainties come from the probe moving in X-Y directions.

References

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