RF MEMS capacitive switch fixed-fixed structure analysis

Microelectromechanical systems known as MEMS, are an enabling technology that describe a field capable of creating very small electromechanical devices with feature sizes on the order of microns, or 10-6 meters. MEMS switches have shown great RF characteristics via low losses and high isolation. However, they possess several important shortcomings. The goal of this paper is to understand the limits of the Capacitive switch operation and predict the impact in practical applications.

I. Introduction

Microelectromechanical systems, otherwise known as MEMS, are an enabling technology that describe a field capable of creating very small devices with feature sizes on the order of microns, or 10–⁶ meters. The technology itself leverages off of the integrated circuit (IC) industry, using much of the same fabrication instruments, processing, and design techniques. MEMS technology creates moving devices on silicon substrates.