An Application Of Mechanical Leverage To Microactuation

Metadata

First Page of the Article

Published in: Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95

Date of Conference: 25-29 June 1995

Date Added to IEEE Xplore: 06 August 2002

Print ISBN:91-630-3473-5

DOI: 10.1109/SENSOR.1995.721822

Conference Location: Stockholm, Sweden

First Page of the Article

Keywords assist with retrieval of results and provide a means to discovering other relevant content. Learn more.

IEEE Keywords
- Actuators ,
- Fingers ,
- Micromechanical devices ,
- Electrostatics ,
- Micromachining ,
- Capacitors ,
- Electrodes ,
- Transducers ,
- Laboratories ,
- Voltage
Index Terms
- Actuator ,
- Range Of Motion ,
- Large Displacement ,
- Mechanical Advantage ,
- Actuation Mechanism ,
- pN Force ,
- Electrode ,
- Mechanical Design ,
- Minimum Gap ,
- Linear Actuator ,
- Displacement Range ,
- Finger Length ,
- Finger Width ,
- Plate Configuration

Keywords assist with retrieval of results and provide a means to discovering other relevant content. Learn more.

IEEE Keywords
- Actuators ,
- Fingers ,
- Micromechanical devices ,
- Electrostatics ,
- Micromachining ,
- Capacitors ,
- Electrodes ,
- Transducers ,
- Laboratories ,
- Voltage
Index Terms
- Actuator ,
- Range Of Motion ,
- Large Displacement ,
- Mechanical Advantage ,
- Actuation Mechanism ,
- pN Force ,
- Electrode ,
- Mechanical Design ,
- Minimum Gap ,
- Linear Actuator ,
- Displacement Range ,
- Finger Length ,
- Finger Width ,
- Plate Configuration

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