Abstract:
The authors have developed a grinding machining method for an ultra thin quartz plane and a curved surface as thin as 9 micrometers. A ring-supported, plano-convex type s...Show MoreMetadata
Abstract:
The authors have developed a grinding machining method for an ultra thin quartz plane and a curved surface as thin as 9 micrometers. A ring-supported, plano-convex type showed an ideal reactance frequency characteristics without any spurious resonance when the thickness is less than 112 micrometers. This method could machine a hard and brittle material such as LiNbO/sub 3/, and the oscillator showed a high performance.
Published in: Proceedings of the 1998 IEEE International Frequency Control Symposium (Cat. No.98CH36165)
Date of Conference: 29-29 May 1998
Date Added to IEEE Xplore: 06 August 2002
Print ISBN:0-7803-4373-5
Print ISSN: 1075-6787