Abstract:
The resonant transformation of acoustic waves in “Al/AlN/Mo/(100) diamond” piezoelectric structure has been studied by means of 2D FEM simulation. The nature of arising a...Show MoreMetadata
Abstract:
The resonant transformation of acoustic waves in “Al/AlN/Mo/(100) diamond” piezoelectric structure has been studied by means of 2D FEM simulation. The nature of arising acoustical modes has been defined by the detail investigation of fields of elastic displacements. It was shown that the appearance of strongest spurious resonant peaks at frequencies above the bulk acoustic overtones is concerned with Lamb-like modes within diamond substrate, excited on the critical frequencies. In these points Lamb mode transforms into standing plate wave. Experimental and calculated data are in good accordance.
Published in: 2015 Joint Conference of the IEEE International Frequency Control Symposium & the European Frequency and Time Forum
Date of Conference: 12-16 April 2015
Date Added to IEEE Xplore: 02 July 2015
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