I. Introduction
Atomic force microscopy (AFM) [1] is an emerging technology that has drawn considerable attention as a practical tool for observing sample surface topography at micro/nano-scale. Recently, AFM has been widely utilized for nano-manipulation through Van der Waals force or mechanical force between AFM probe tip and samples. Many AFM-based approaches for nano-manipulation have been proposed to successfully manipulate targets at nano-scale [2]–[4], and overall, these approaches consist of four steps: acquiring image of interest region, designing offline strategy for nano-manipulation, manipulating nano-targets with AFM, and validating the nano-manipulation results.