Abstract:
We describe the Simplex architecture, a real-time software technology which supports the safe, reliable introduction of control system upgrades while the system is runnin...Show MoreMetadata
Abstract:
We describe the Simplex architecture, a real-time software technology which supports the safe, reliable introduction of control system upgrades while the system is running. We introduce its basic structure in control systems, discuss its fault-tolerance feature, and investigate the control issues when the technology is employed. Application of the Simplex architecture is demonstrated for a plasma-enhanced chemical vapor deposition (PECVD) system, a standard process in semiconductor manufacturing. We conclude the paper with a discussion of the potential impact that the Simplex architecture can make on future control applications.
Date of Conference: 26-26 June 1998
Date Added to IEEE Xplore: 06 August 2002
Print ISBN:0-7803-4530-4
Print ISSN: 0743-1619
Keywords assist with retrieval of results and provide a means to discovering other relevant content. Learn more.
- IEEE Keywords
- Index Terms
- Control System ,
- Simplex ,
- Safety Control ,
- Upgraded System ,
- Chemical Vapor Deposition ,
- Standard Process ,
- Fault-tolerant ,
- Semiconductor Industry ,
- Plasma-enhanced Chemical Vapor Deposition ,
- Chemical Vapor Deposition System ,
- Control Experiments ,
- Active Control ,
- System State ,
- Transition State ,
- Optimal Control ,
- Physical System ,
- Nominal Value ,
- Model Predictive Control ,
- Input Processing ,
- Trajectories Of System ,
- Model Predictive Control Algorithm ,
- Linear Quadratic Gaussian ,
- Baseline Control ,
- State Diagram ,
- Computer-controlled System ,
- Plasma Species ,
- RF Power ,
- Boolean Variable ,
- Switching Control ,
- Restricted Region
Keywords assist with retrieval of results and provide a means to discovering other relevant content. Learn more.
- IEEE Keywords
- Index Terms
- Control System ,
- Simplex ,
- Safety Control ,
- Upgraded System ,
- Chemical Vapor Deposition ,
- Standard Process ,
- Fault-tolerant ,
- Semiconductor Industry ,
- Plasma-enhanced Chemical Vapor Deposition ,
- Chemical Vapor Deposition System ,
- Control Experiments ,
- Active Control ,
- System State ,
- Transition State ,
- Optimal Control ,
- Physical System ,
- Nominal Value ,
- Model Predictive Control ,
- Input Processing ,
- Trajectories Of System ,
- Model Predictive Control Algorithm ,
- Linear Quadratic Gaussian ,
- Baseline Control ,
- State Diagram ,
- Computer-controlled System ,
- Plasma Species ,
- RF Power ,
- Boolean Variable ,
- Switching Control ,
- Restricted Region
